Latest oppositions filed by Carl Zeiss Smt Gmbh

This table presents recent patent oppositions filed by Carl Zeiss Smt Gmbh against its competitors. It outlines key details of each case, including the patent title, filing date and the applicant. This information provides insights into the competitive landscape and highlights active disputes over patent grant within the industry.

Patent NumberTitleApplicantOpposition Date
EP3272432Debris Removal From High Aspect StructuresBRUKER NANO, INC.May 22, 2024
EP3726566Debris Removal From A Trench Formed On A Photolithographic MaskBRUKER NANO, INC.Mar 2, 2024
EP3748431Debris Removal From High Aspect StructuresBRUKER NANO, INC.Jun 8, 2022