| Patent Number | Title | Applicant | Opposition Date |
|---|---|---|---|
| EP3272432 | Debris Removal From High Aspect Structures | BRUKER NANO, INC. | May 22, 2024 |
| EP3726566 | Debris Removal From A Trench Formed On A Photolithographic Mask | BRUKER NANO, INC. | Mar 2, 2024 |
| EP3748431 | Debris Removal From High Aspect Structures | BRUKER NANO, INC. | Jun 8, 2022 |
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