| Patent Number | Title | Applicant | Opposition Date |
|---|---|---|---|
| EP3621766 | Method For Producing A 3D Structure By Means Of Laser Lithography With A Modified Exposure Dose At Edge Portions, And Corresponding Computer Program Product | NANOSCRIBE GMBH | Oct 5, 2022 |
| EP3266594 | Method And Apparatus For Lithography-Based Generative Production Of Three-Dimensional Articles | TECHNISCHE UNIVERSITÄT WIEN | Dec 11, 2020 |
| EP3012688 | Method For Producing A Three-Dimensional Structure | NANOSCRIBE GMBH | Jul 2, 2020 |
| EP2978593 | Production Of 3D Free-Form Waveguide Structures | KARLSRUHER INSTITUT FÜR TECHNOLOGIE (KIT) | Jun 27, 2018 |
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