| Patent Number | Grant Date | Title | Total Oppositions |
|---|---|---|---|
| EP3012688 | Feb 8, 2023 | Method For Producing A Three-Dimensional Structure | 1 |
| EP3621766 | Jan 5, 2022 | Method For Producing A 3D Structure By Means Of Laser Lithography With A Modified Exposure Dose At Edge Portions, And Corresponding Computer Program Product | 2 |
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