Cmp Method For Metal-Containing Substrates - EP2052048

The patent EP2052048 was granted to Cabot Microelectronics on Jan 24, 2018. The application was originally filed on Jul 6, 2007 under application number EP07796716A. The patent is currently recorded with a legal status of "No Opposition Filed Within Time Limit".

EP2052048

CABOT MICROELECTRONICS
Application Number
EP07796716A
Filing Date
Jul 6, 2007
Status
No Opposition Filed Within Time Limit
Nov 30, 2018
Publication Date
Jan 24, 2018
External Links
Slate, Register, Google Patents

Patent Summary

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