Cmp Method For Metal-Containing Substrates - EP2052048
EP2052048
- Application Number
- EP07796716A
- Filing Date
- Jul 6, 2007
- Status
- No Opposition Filed Within Time Limit
- Nov 30, 2018
- Grant Date
- Jan 24, 2018
- External Links
- Slate, Register, Google Patents
Bibliography
The patent EP2052048B1 was granted to Cabot Microelectronics on Jan 24, 2018 following the initial filing on Jul 6, 2007 under the application number EP07796716A . The current legal status of the patent is No Opposition Filed Within Time Limit.
Patent Summary
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Dossier Documents
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