Apparatus And Method For Deterministic Control Of Surface Figure During Full Aperture Polishing - EP2213412
The patent EP2213412 was granted to Feit on Jan 10, 2018. The application was originally filed on Jan 29, 2010 under application number EP10152206A. The patent is currently recorded with a legal status of "No Opposition Filed Within Time Limit".
EP2213412
- Application Number
- EP10152206A
- Filing Date
- Jan 29, 2010
- Status
- No Opposition Filed Within Time Limit
- Nov 16, 2018
- Grant Date
- Jan 10, 2018
- External Links
- Slate, Register, Google Patents
Patent Summary
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Dossier Documents
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