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Octopole Device And Method For Spot Size Improvement - EP2722868

The patent EP2722868 was granted to ICT Integrated Circuit Testing Gesellschaft FR Halbleiterprftechnik on Mar 26, 2025. The application was originally filed on Oct 16, 2012 under application number EP12188686A. The patent is currently recorded with a legal status of "Patent Maintained As Amended".

EP2722868

ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FR HALBLEITERPRFTECHNIK
Application Number
EP12188686A
Filing Date
Oct 16, 2012
Status
Patent Maintained As Amended
Feb 21, 2025
Grant Date
Mar 26, 2025
External Links
Slate, Register, Google Patents

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CARL ZEISSNov 21, 2018CARL ZEISS PATENTABTEILUNG -

Patent Citations (13) New

Patent citations refer to prior patents cited during different phases such as opposition or international search.

Citation PhasePublication NumberPublication Link
DESCRIPTIONEP1432007
EXAMINATIONUS2011192976
OPPOSITIONEP0500179
OPPOSITIONEP1335402
OPPOSITIONEP1432006
OPPOSITIONUS6784437
OPPOSITIONUS7807965
SEARCHEP0500179
SEARCHEP1335402
SEARCHEP1432006
SEARCHUS6646267
SEARCHUS6784437
SEARCHUS7807965

Non-Patent Literature (NPL) Citations (2) New

NPL citations refer to non-patent references such as research papers, articles, or other publications cited during examination or opposition phases.

Citation PhaseReference TextLink
OPPOSITION- SCHERZER, "Sphärische und chromatische Korrektur von Elektronen-Linsen", Jena, (19470000), ISSN 0863-0259, pages 114 - 132-
SEARCH- SCHERZER, "Sphärische und chromatische Korrektur von Elektronen-Linsen", OPTIK, JENA, DE, (19470101), ISSN 0863-0259, pages 114 - 132, XP002090897 [X] 1,11 * the whole document *-

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