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Testing Assembly Including A Multiple Degree Of Freedom Stage - EP2761357

The patent EP2761357 was granted to Bruker Nano on Sep 7, 2022. The application was originally filed on Sep 28, 2012 under application number EP12835945A. The patent is currently recorded with a legal status of "Opposition Rejected".

EP2761357

BRUKER NANO
Application Number
EP12835945A
Filing Date
Sep 28, 2012
Status
Opposition Rejected
Feb 28, 2025
Grant Date
Sep 7, 2022
External Links
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FEMTOTOOLSJun 5, 2023MULLER HOFFMANN & PARTNERADMISSIBLE

Patent Citations (27) New

Patent citations refer to prior patents cited during different phases such as opposition or international search.

Citation PhasePublication NumberPublication Link
DESCRIPTIONJP2000097836
DESCRIPTIONUS2007045537
DESCRIPTIONUS5559329
INTERNATIONAL-SEARCH-REPORTUS2007023684
INTERNATIONAL-SEARCH-REPORTUS2010108884
INTERNATIONAL-SEARCH-REPORTUS6058592
INTERNATIONAL-SEARCH-REPORTUS6403968
INTERNATIONAL-SEARCH-REPORTUS6583411
INTERNATIONAL-SEARCH-REPORTUS8008633
OPPOSITIONJP2000097836
OPPOSITIONJP2008305679
OPPOSITIONJPH01311550
OPPOSITIONJPS60136143
OPPOSITIONUS2003094583
OPPOSITIONUS2007045537
OPPOSITIONUS5066131
OPPOSITIONUS5103095
OPPOSITIONUS5227626
OPPOSITIONUS5559329
OTHEREP2761357
SEARCHJP2000097836
SEARCHJP2008305679
SEARCHJPH01311550
SEARCHJPS60136143
SEARCHUS2003094583
SEARCHUS2007045537
SEARCHUS5559329

Non-Patent Literature (NPL) Citations (16) New

NPL citations refer to non-patent references such as research papers, articles, or other publications cited during examination or opposition phases.

Citation PhaseReference TextLink
EXAMINATION- Anonymous, "Newport Catalog - DS Series Compact Dovetail Linear Stages", (20090803), pages 896 - 897, URL: https://web.archive.org/web/20090803083009/http://www.newport.com/virtual/getdocument.aspx?f2=RxCvLECIfrsFBgC4GIuh83opevDJqxCUU26p01OKZw0UQsTukiB%2Fpf%2FvSizAI3QdmpHYYEYh7fg%3D&f1=RtS0B4xjcUTUV9nkkmFgp9UW%2BvoH7SLFGHZ%2FKlGbFV9UmRF5%2BPi3Zh3%2FRUfHgqew7QF2e0ISCpF3X%2BovQCiZfA%3D%3D, (20220619), XP055932852-
EXAMINATION- Anonymous, "Newport Catalog - GON Series Goniometers", (20100115), pages 914 - 915, URL: https://web.archive.org/web/20100115073709/http://newport.com/virtual/getdocument.aspx?f2=a5j9d9nJzdBpLKi8bYhTS2IYoNr0vkeYl6%2fc3QbZuxZ5dlcoStKXQifFmJ4qxVSEKXwXqWjTxqnJgZ7UYeCIhQ%3d%3d&f1=RtS0B4xjcUTUV9nkkmFgp9UW%2bvoH7SLFGHZ%2fKlGbFV9UmRF5%2bPi3Zh3%2fRUfHgqews9LUQRHcnCBH%2fgIz%2fOiurA%3d%3d, (20220619), XP055932853-
EXAMINATION- Rodolfo Rabe, "Compact test platform for in-situ indentation and scratching inside a scanning electron microscope (SEM); Th�se No 3593 (2006), �cole Polytechnique F�d�rale de Lausanne", (20060818), URL: https://infoscience.epfl.ch/record/86070/files/EPFL_TH3593.pdf?version=1, (20201124), XP055753743-
EXAMINATION- TORRENTS A ET AL, "MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design", JOURNAL OF MICROMECHANICS AND MICROENGINEERING, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, (20101108), vol. 20, no. 12, doi:10.1088/0960-1317/20/12/125004, ISSN 0960-1317, pages 125004:1 - -17, XP020201627
EXAMINATION- AZGIN K ET AL, "A resonant tuning fork force sensor with unprecedented combination of resolution and range", PROCEEDINGS OF THE IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) - 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS 2011 2011 INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS INC. USA, (2011), doi:10.1109/MEMSYS.2011.5734482, pages 545 - 548, XP031982469
OPPOSITION- Anonymous, "Anti-Backlash Goniometric Rotation Stages", Newport Website: Products / Motion Control / Rotation and Tilt Stages / Manual Goniometric Stages, Newport Corporation, (20241018), pages 1 - 3, Newport Website: Products / Motion Control / Rotation and Tilt Stages / Manual Goniometric Stages, URL: https://www.newport.com/f/anti-backlash-goniometric-rotation-stages, XP093216128-
OPPOSITION- Niederberger, C. ; Mook, W.M. ; Maeder, X. ; Michler, J., "In situ electron backscatter diffraction (EBSD) during the compression of micropillars", Materials Science, ELSEVIER, AMSTERDAM, NL, AMSTERDAM, NL, (20100625), vol. 527, no. 16-17, ISSN 0921-5093, pages 4306 - 4311, XP027047021-
OPPOSITION- Rabe Rodolfo, "COMPACT TEST PLATFORM FOR IN-SITU INDENTATION AND SCRATCHING INSIDE A SCANNING ELECTRON MICROSCOPE (SEM)", Doctoral Thesis, Federal University of Santa Catarina (Brasil), (20060101), Doctoral Thesis, Federal University of Santa Catarina (Brasil), URL: https://citeseerx.ist.psu.edu/document?repid=rep1&type=pdf&doi=eca8ad6749d8fb4fc3ea49353a0f1be13f8ccc66, (20231213), XP093111902-
OPPOSITION- Zaefferer S; Wright S I, "Three-dimensional orientation microscopy by serial sectioning and EBSD-based orientation mapping in a FIB-SEM", Zaefferer S; Wright S I, Schwartz, Adam J., Electron Backscatter Diffraction in Materials Science, US , New York, NY : Springer, 2009 , (20090101), pages 109 - 122, doi:10.1007/978-0-387-88136-2_8, ISBN 978-0-387-88135-5, XP009529382
OPPOSITION- Bergers L. I. J. C., Hoefnagels J. P. M., Dekkers E. C. A., Geers M. G. D., "A nano-tensile tester for creep studies : Proceedings of the 2011 Annual Conference on Experimental and Applied Mechanics", MEMS and Nanotechnology, Volume 4 : Proceedings of the 2011 Annual Conference on Experimental and Applied Mechanics, New York, NY, Springer New York, (20110101), pages 25 - 29, doi:10.1007/978-1-4614-0210-7_4, ISSN 2191-5644, ISBN 978-1-4614-0210-7, XP093111887
OPPOSITION- M Yoshino, T Aoki, T Shirakashi, R Komanduri, "Some experiments on the scratching of silicon:", INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES., PERGAMON PRESS, OXFORD., GB, GB , (20010201), vol. 43, no. 2, doi:10.1016/S0020-7403(00)00019-9, ISSN 0020-7403, pages 335 - 347, XP055753745
OPPOSITION- Gianola D.; Sedlmayr A.; Mönig R.; Volkert C.; Major R.; Cyrankowski E.; Asif S.; Warren O.; Kraft O., "In situ nanomechanical testing in focused ion beam and scanning electron microscopes", Review of Scientific Instruments, American Institute of Physics, 2 Huntington Quadrangle, Melville, NY 11747, 2 Huntington Quadrangle, Melville, NY 11747, (20110603), vol. 82, no. 6, doi:10.1063/1.3595423, ISSN 0034-6748, pages 63901 - 063901-12, XP012146506
OPPOSITION- A Torrents; K Azgin; S W Godfrey; E S Topalli; T Akin; L Valdevit, "MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design;MEMS resonant load cells for micro-mechanical test frames", Journal of Micromechanics and Microengineering, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, GB , (20101108), vol. 20, no. 12, doi:10.1088/0960-1317/20/12/125004, ISSN 0960-1317, page 125004, XP020201627
OPPOSITION- Yamamoto Y., Konishi R., Negishi Y., Arakawa M., "Tool development for force-feedback micro manipulation system", PROCEEDINGS OF THE 2003 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS. (IROS 2003). LAS VEGAS, NV, OCT. 27 - 31, 2003., NEW YORK, NY : IEEE., US, US , (20031027), vol. 3, doi:10.1109/IROS.2003.1249206, ISBN 978-0-7803-7860-5, pages 2254 - 2259, XP010675409
OPPOSITION- Rzepiejewska-Malyska K.A., Buerki G., Michler J., Major R.C., Cyrankowski E., Asif S.A.S., Warren O.L., "In situ mechanical observations during nanoindentation inside a high-resolution scanning electron microscope", JOURNAL OF MATERIALS RESEARCH, MATERIALS RESEARCH SOCIETY, WARRENDALE, PA, US, US , (20080701), vol. 23, no. 7, doi:10.1557/JMR.2008.0240, ISSN 0884-2914, pages 1973 - 1979, XP093111884
OPPOSITION- Kiener D; Motz C; Dehm G; Pippan R, "Overview on established and novel FIB based miniaturized mechanical testing using in-situ SEM", INTERNATIONAL JOURNAL OF MATERIALS RESEARCH., CARL HANSER VERLAG, MUNCHEN., DE, DE , (20090731), vol. 100, no. 8, doi:10.3139/146.110149, ISSN 1862-5282, pages 1074 - 1087, XP009529383

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