Mini Rotatable Sputter Devices For Sputter Deposition - EP2826057

The patent EP2826057 was granted to Applied Materials on Jan 24, 2018. The application was originally filed on Mar 12, 2012 under application number EP12709309A. The patent is currently recorded with a legal status of "No Opposition Filed Within Time Limit".

EP2826057

APPLIED MATERIALS
Application Number
EP12709309A
Filing Date
Mar 12, 2012
Status
No Opposition Filed Within Time Limit
Nov 30, 2018
Publication Date
Jan 24, 2018
External Links
Slate, Register, Google Patents

Patent Summary

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Dossier Documents

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