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Compound, Material For Forming Underlayer Film For Lithography, Underlayer Film For Lithography, And Pattern Formation Method - EP2955577B1

EP2955577

MITSUBISHI GAS CHEMICAL
Application Number
EP14749602A
Filing Date
Feb 4, 2014
Status
No Opposition Filed Within Time Limit
Dec 7, 2018
Grant Date
Jan 31, 2018
External Links
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The patent EP2955577B1 was granted to Mitsubishi GAS Chemical on Jan 31, 2018 following the initial filing on Feb 4, 2014 under the application number EP14749602A . The current legal status of the patent is No Opposition Filed Within Time Limit.

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