Cmp Compositions With Low Solids Content And Methods Related Thereto - EP2970732

The patent EP2970732 was granted to Cabot Microelectronics on Jan 17, 2018. The application was originally filed on Mar 12, 2014 under application number EP14767288A. The patent is currently recorded with a legal status of "No Opposition Filed Within Time Limit".

EP2970732

CABOT MICROELECTRONICS
Application Number
EP14767288A
Filing Date
Mar 12, 2014
Status
No Opposition Filed Within Time Limit
Nov 23, 2018
Publication Date
Jan 17, 2018
External Links
Slate, Register, Google Patents

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