Injector Head For Atomic Layer Deposition - EP3004417

EP3004417

SOLAYTEC
Application Number
EP14731834A
Filing Date
May 30, 2014
Status
No Opposition Filed Within Time Limit
Dec 7, 2018
Grant Date
Jan 31, 2018
External Links
Slate, Register, Google Patents

Bibliography

The patent EP3004417B1 was granted to Solaytec on Jan 31, 2018 following the initial filing on May 30, 2014 under the application number EP14731834A . The current legal status of the patent is No Opposition Filed Within Time Limit.

Patent Summary

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Dossier Documents

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