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Radiation Source - EP3688530

The patent EP3688530 was granted to Asml Netherlands on Oct 4, 2023. The application was originally filed on Aug 17, 2018 under application number EP18765017A. The patent is currently recorded with a legal status of "Granted And Under Opposition".

EP3688530

ASML NETHERLANDS
Application Number
EP18765017A
Filing Date
Aug 17, 2018
Status
Granted And Under Opposition
Sep 1, 2023
Grant Date
Oct 4, 2023
External Links
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NKT PHOTONICSJul 2, 2024ZACCO DENMARKADMISSIBLE

Patent Citations (20) New

Patent citations refer to prior patents cited during different phases such as opposition or international search.

Citation PhasePublication NumberPublication Link
DESCRIPTIONUS2009195768
DESCRIPTIONUS2015261097
DESCRIPTIONUS6952253
DESCRIPTIONUS6961116
INTERNATIONAL-SEARCH-REPORTUS2011085726
INTERNATIONAL-SEARCH-REPORTUS8385699
INTERNATIONAL-SEARCH-REPORTWO2017062181
OPPOSITIONEP1734622
OPPOSITIONUS2005225846
OPPOSITIONUS2009296759
OPPOSITIONUS2010329292
OPPOSITIONUS2011032605
OPPOSITIONUS2011085726
OPPOSITIONUS2013163071
OPPOSITIONUS2013177031
OPPOSITIONUS2015138507
OPPOSITIONUS8385699
OPPOSITIONWO2017062181
OPPOSITIONWO2017062275
OPPOSITIONWO2019063193

Non-Patent Literature (NPL) Citations (3) New

NPL citations refer to non-patent references such as research papers, articles, or other publications cited during examination or opposition phases.

Citation PhaseReference TextLink
OPPOSITION- Alexander Vinay V.; Kulkarni Ojas P.; Kumar Malay; Xia Chenan; Islam Mohammed N.; Terry Fred L.; Welsh Michael J.; Ke Kevin; Freeman Michael J.; Neelakandan Manickam; Chan Allan, "Modulation instability initiated high power all-fiber supercontinuum lasers and their applications", Optical Fiber Technology, ELSEVIER, AMSTERDAM, NL, AMSTERDAM, NL , (19000101), vol. 18, no. 5, doi:10.1016/j.yofte.2012.07.014, ISSN 1068-5200, pages 349 - 374, XP028944547
OPPOSITION- Zhao Jian, Guiraud Germain, Floissat Florian, Gouhier Benoit, Rota-Rodrigo Sergio, Traynor Nicholas, Santarelli Giorgio, "Gain dynamics of clad-pumped Yb-fiber amplifier and intensity noise control", Optics Express, Optical Society of America, US, US, (20170109), vol. 25, no. 1, doi:10.1364/OE.25.000357, ISSN 1094-4087, page 357, XP093195901
OPPOSITION- Tao Wei Tao, Jianfeng Li Jianfeng Li, Jianhua Zhu Jianhua Zhu, "Theoretical and experimental study of transient response of the Yb-doped fiber amplifier", CHINESE OPTICS LETTERS, Chinese Optical Society, CN, CN , (20120101), vol. 10, no. 4, doi:10.3788/COL201210.040605, ISSN 1671-7694, pages 040605 - 40608, XP093195905

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Dossier Documents

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