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Debris Removal From A Trench Formed On A Photolithographic Mask - EP3726566

The patent EP3726566 was granted to Bruker Nano on Aug 2, 2023. The application was originally filed on Sep 16, 2008 under application number EP20178955A. The patent is currently recorded with a legal status of "Granted And Under Opposition".

EP3726566

BRUKER NANO
Application Number
EP20178955A
Filing Date
Sep 16, 2008
Status
Granted And Under Opposition
Jun 30, 2023
Grant Date
Aug 2, 2023
External Links
Slate, Register, Google Patents

Patent Summary

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CARL ZEISSMar 2, 2024GLAWEADMISSIBLE

Patent Citations (12) New

Patent citations refer to prior patents cited during different phases such as opposition or international search.

Citation PhasePublication NumberPublication Link
EXAMINATIONCN100484867C
OPPOSITIONCN1733596
OPPOSITIONJP2005084582
OPPOSITIONJP2005311320
OPPOSITIONJP2007027195
OPPOSITIONJP2007205849
OPPOSITIONJPH06260464
OPPOSITIONUS2004089816
OPPOSITIONUS5634230
SEARCHCN1733596
SEARCHUS2005255796
SEARCHUS5634230

Non-Patent Literature (NPL) Citations (2) New

NPL citations refer to non-patent references such as research papers, articles, or other publications cited during examination or opposition phases.

Citation PhaseReference TextLink
OPPOSITION- Nie H.-Y., Mcintyre N. S., "A Simple and Effective Method of Evaluating Atomic Force Microscopy Tip Performance", Langmuir, American Chemical Society, US, US , (20010101), vol. 17, no. 2, doi:10.1021/la001035f, ISSN 0743-7463, pages 432 - 436, XP093188334
OPPOSITION- G Binnig, Quate Cf, Gerber Ch, "Atomic Force Microscope", Physical review Letters, New York , (19860303), vol. 56, no. 9, doi:10.1103/PhysRevLett.56.930, pages 930 - 934, XP055232330

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Dossier Documents

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