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Debris Removal From High Aspect Structures - EP3748431

The patent EP3748431 was granted to Bruker Nano on Sep 8, 2021. The application was originally filed on Jan 26, 2017 under application number EP20189018A. The patent is currently recorded with a legal status of "Granted And Under Opposition".

EP3748431

BRUKER NANO
Application Number
EP20189018A
Filing Date
Jan 26, 2017
Status
Granted And Under Opposition
Aug 6, 2021
Grant Date
Sep 8, 2021
External Links
Slate, Register, Google Patents

Patent Summary

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CARL ZEISSJun 8, 2022GLAWEADMISSIBLE

Patent Citations (8) New

Patent citations refer to prior patents cited during different phases such as opposition or international search.

Citation PhasePublication NumberPublication Link
OPPOSITIONJP2005084582
OPPOSITIONJP2009265176
OPPOSITIONUS8334084
OPPOSITIONWO2014125494
SEARCHJP2007298858
SEARCHJP2013068786
SEARCHUS2009071506
SEARCHUS2009241274

Non-Patent Literature (NPL) Citations (4) New

NPL citations refer to non-patent references such as research papers, articles, or other publications cited during examination or opposition phases.

Citation PhaseReference TextLink
OPPOSITION- "Chapter 7", EUV LITHOGRAPHY / VIVEK BAKSHI, SPIE, (20090000), pages 325 - 381-
OPPOSITION- Denisyuk Andrey I., Krasavin Alexey V., Komissarenko Filipp E., Mukhin Ivan S., "Mechanical, Electrostatic, and Electromagnetic Manipulation of Microobjects and Nanoobjects in Electron Microscopes", Advances in Imaging and Electron Physics, (20140000), vol. 186, pages 101 - 140, XP055933112
OPPOSITION- Robinson Tod, Dinsdale Andrew, Archuletta Mike, Bozak Ron, White Roy, "Nanomachining photomask repair of complex patterns", Proc. SPIE 7122, Photomask Technology, (20081017), vol. 7122, pages 1 - 12, XP055933103
OPPOSITION- Pei-Yang Yan; Michael Leeson; Sang Lee; Guojing Zhang; Eric Gullikson; Farhad Salmassi, "Extreme ultraviolet-embedded phase-shift mask", J. Micro/Nanolith., (20110700), vol. 10, no. 3, pages 1 - 11, XP055016128

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Dossier Documents

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