A Method For Forming An Euvl Pellicle - EP3842861

EP3842861

IMEC VZW
Application Number
EP19219382A
Filing Date
Dec 23, 2019
Status
Granted And Under Opposition
Feb 7, 2025
Grant Date
Mar 12, 2025
External Links
Slate, Register, Google Patents

Bibliography

The patent EP3842861B1 was granted to Imec VZW on Mar 12, 2025 following the initial filing on Dec 23, 2019 under the application number EP19219382A . The current legal status of the patent is Granted And Under Opposition.

Patent Summary

Patent Family

Patent Family

Dossier Documents

The dossier documents provide a comprehensive record of the patent’s prosecution history - including filings, correspondence, and decisions made by patent offices - and are crucial for understanding the patent’s legal journey and any challenges it may have faced during examination.

  • Date

    Description

  • Get instant alerts for new documents