Compound For Forming Metal-Containing Film, Composition For Forming Metal-Containing Film, And Patterning Process - EP4575640
The patent EP4575640 was granted to Shin Etsu Chemical on Aug 27, 2025. The application was originally filed on Dec 12, 2024. The patent is currently recorded with a legal status of "Pending".
EP4575640
- Filing Date
- Dec 12, 2024
- Status
- Pending
- Publication Date
- Aug 27, 2025
- External Links
- Slate, Register, Google Patents
Patent Summary
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Dossier Documents
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