Compound For Forming Metal-Containing Film, Composition For Forming Metal-Containing Film, And Patterning Process - EP4575640
EP4575640
- Filing Date
- Dec 12, 2024
- Status
- Pending
- Grant Date
- Aug 27, 2025
- External Links
- Slate, Register, Google Patents
Bibliography
The patent EP4575640A3 was granted to Shin Etsu Chemical on Aug 27, 2025 following the initial filing on Dec 12, 2024 under the application number The current legal status of the patent is Pending.
Patent Summary
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Dossier Documents
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