Susceptorless Reactor For Growing Epitaxial Layers On Wafers By Chemical Vapor Deposition

Patent No. EP1358368 (titled "Susceptorless Reactor For Growing Epitaxial Layers On Wafers By Chemical Vapor Deposition") was filed by Emcore on Aug 21, 2001. The application was issued on Apr 13, 2016.

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CompanyOpposition DateRepresentative
MARCHI & PARTNERSJan 13, 2017COLOMBO

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  • Date

    Description

EP1358368

EMCORE
Application Number
EP01964250A
Filing Date
Aug 21, 2001
Status
Opposition Rejected
Mar 22, 2019
Publication Date
Apr 13, 2016