Particle Beam Device Having A Detector Arrangement

Patent No. EP2506285 (titled "Particle Beam Device Having A Detector Arrangement") was filed by Carl Zeiss Microscopy GmbH on Mar 29, 2012. The application was issued on Dec 16, 2015.

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CompanyOpposition DateRepresentative
TESCAN BRNOSep 16, 2016KENDERESKI

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  • Date

    Description

EP2506285

CARL ZEISS MICROSCOPY GMBH
Application Number
EP12161975A
Filing Date
Mar 29, 2012
Status
Revoked
Apr 15, 2019
Publication Date
Dec 16, 2015