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Arrangement And Method For The Contrast Improvement In A Charged Particle Beam Device For Inspecting A Specimen

Patent No. EP2511939 (titled "Arrangement And Method For The Contrast Improvement In A Charged Particle Beam Device For Inspecting A Specimen") was filed by ICT Integrated Circuit Testing Gesellschaft FR Halbleiterprftechnik on Apr 13, 2011. The application was issued on Mar 23, 2016.

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CompanyOpposition DateRepresentative
CARL ZEISS MICROSCOPY GMBHDec 23, 2016CARL ZEISS PATENTABTEILUNG

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  • Date

    Description

EP2511939

ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FR HALBLEITERPRFTECHNIK
Application Number
EP11162291A
Filing Date
Apr 13, 2011
Status
Opposition Rejected
Sep 22, 2023
Publication Date
Mar 23, 2016
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