Octopole Device And Method For Spot Size Improvement

Patent No. EP2722868 (titled "Octopole Device And Method For Spot Size Improvement") was filed by ICT Integrated Circuit Testing Gesellschaft FR Halbleiterprftechnik on Oct 16, 2012. The application was issued on Mar 26, 2025.

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CARL ZEISSNov 21, 2018CARL ZEISS PATENTABTEILUNG

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EP2722868

ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FR HALBLEITERPRFTECHNIK
Application Number
EP12188686A
Filing Date
Oct 16, 2012
Status
Patent Maintained As Amended
Feb 21, 2025
Publication Date
Mar 26, 2025