Case Isolated Oil Filled Mems Pressure Sensor
Patent No. EP3029443 (titled "Case Isolated Oil Filled Mems Pressure Sensor") was filed by Sensata on Nov 20, 2015. The application was issued on May 8, 2019.
Patent Summary
An oil-filled pressure sensor comprises a signal drift-stabilized pressure sensing element, featuring a field shield to mitigate offset drift caused by surface charge accumulation and molecular polarizability of the fill oil. The sensing element is mounted to and electrically isolated from a header body via at least one glass-to-metal seal. It is immersed in a temperature-stabilized, oil-filled cavity to sense pressure without substantial signal drift. This hermetically sealed cavity is defined by an assembly including the sensing element, a baseplate, and a diaphragm disposed between the cavity and a pressure port. The design optimizes oil volume and diaphragm geometry to reduce the effects of thermal expansion and contraction of the oil on sensor output.
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Date
Description
EP3029443
- Application Number
- EP15195593A
- Filing Date
- Nov 20, 2015
- Status
- Revoked
- Apr 2, 2022
- Publication Date
- May 8, 2019
- External Links
- Slate, Register , Google Patents