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Measurement Probe Unit For Metrology Applications

Patent No. EP3129750 (titled "Measurement Probe Unit For Metrology Applications") was filed by LK Metrology on Apr 8, 2015. The application was issued on May 31, 2023.

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CompanyOpposition DateRepresentative
CARL ZEISSFeb 27, 2024PATENTANWALTE BRESSEL UND PARTNER MBB

Dossier Documents

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EP3129750

LK METROLOGY
Application Number
EP15717837A
Filing Date
Apr 8, 2015
Status
Granted And Under Opposition
Apr 28, 2023
Publication Date
May 31, 2023
External Links
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