Patent No. EP3257964 (titled "Manufacturing Method For Deposition Mask, Metal Sheet Used For Producing Deposition Mask, And Manufacturing Method For Said Metal Sheet") was filed by DAI Nippon Printing on Feb 5, 2016. The application was issued on Nov 13, 2019.
A manufacturing method for a metal plate used in deposition masks, comprising preparing a plate member made of an iron alloy containing 30 to 54% by mass of nickel, and annealing the plate member in an atmosphere containing less than 0.4% by volume of reducing gas. The method enables the formation of a resist pattern with a narrow width on the metal plate, particularly when using a dry film resist. The metal plate is suitable for manufacturing deposition masks with high-resolution through-holes, particularly for organic EL display devices.
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