IP Verse

Radiation Source

Patent No. EP3688530 (titled "Radiation Source") was filed by Asml Netherlands on Aug 17, 2018. The application was issued on Oct 4, 2023.

Patent Summary

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Patent Oppositions

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CompanyOpposition DateRepresentative
NKT PHOTONICSJul 2, 2024ZACCO DENMARK

Dossier Documents

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EP3688530

ASML NETHERLANDS
Application Number
EP18765017A
Filing Date
Aug 17, 2018
Status
Granted And Under Opposition
Sep 1, 2023
Publication Date
Oct 4, 2023
External Links
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