Dry Vacuum Pump Apparatus

Patent No. EP3842642 (titled "Dry Vacuum Pump Apparatus") was filed by Ebara on Apr 18, 2011. The application was issued on Sep 14, 2022.

Patent Summary

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Patent Oppositions

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CompanyOpposition DateRepresentative
PFEIFFER VACUUMJun 13, 2023INNOVINCIA

Dossier Documents

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EP3842642

EBARA
Application Number
EP21157362A
Filing Date
Apr 18, 2011
Status
Granted And Under Opposition
Aug 12, 2022
Publication Date
Sep 14, 2022