A Method For Forming An Euvl Pellicle

Patent No. EP3842861 (titled "A Method For Forming An Euvl Pellicle") was filed by Imec VZW on Dec 23, 2019. The application was issued on Mar 12, 2025.

The dossier documents provide a comprehensive record of the patent's prosecution history - including filings, correspondence, and decisions made by patent offices - and are crucial for understanding the patent's legal journey and any challenges it may have faced during examination.

Date
Description

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Jan 16, 2026
Communication regarding the expiry of opposition period
Mar 25, 2025
Transmission of the certificate for a European patent pursuant to Rule 74 EPC
Feb 13, 2025
Decision to grant a European patent
Jan 30, 2025
(Electronic) Receipt
Jan 30, 2025
Filing of the translations of the claims
Jan 30, 2025
French translation of claims
Jan 30, 2025
German translation of the claims
Dec 13, 2024
Annex to the communication about intention to grant a European patent
Dec 13, 2024
Bibliographic data of the European patent application
Dec 13, 2024
Communication about intention to grant a European patent
Dec 13, 2024
Intention to grant (signatures)
Dec 13, 2024
Text intended for grant (clean copy)
Dec 13, 2024
Text intended for grant (version for approval)
Dec 3, 2024
Examination started
Oct 8, 2024
Response to enquiry for communication from the Examining Division
Sep 25, 2024
(Electronic) Receipt
Sep 25, 2024
Enquiry as to the processing of the file
Sep 25, 2024
Letter accompanying subsequently filed items
Sep 24, 2024
Communication concerning signing of documents
Sep 19, 2024
(Electronic) Receipt
Sep 19, 2024
Enquiry as to the processing of the file
Sep 19, 2024
Letter accompanying subsequently filed items
Feb 3, 2022
Document concerning representation
Feb 3, 2022
Document concerning representation
Jul 29, 2021
(Electronic) Receipt
Jul 29, 2021
Amended claims filed after receipt of (European) search report
Jul 29, 2021
Amended claims with annotations
Jul 29, 2021
Amended description filed after receipt of (European) search report
Jul 29, 2021
Amended description with annotations
Jul 29, 2021
Amendments received before examination
Jul 29, 2021
Letter accompanying subsequently filed items
Jul 5, 2021
Reminder period for payment of examination fee/designation fee and correction of deficiencies in Written Opinion/amendment
Jun 2, 2021
Notification of forthcoming publication
Jun 12, 2020
Communication regarding the transmission of the European search report
Jun 12, 2020
European search opinion
Jun 12, 2020
European search report
Jun 12, 2020
Information on Search Strategy
May 27, 2020
Search started
Mar 10, 2020
Communication to designated inventor
Mar 10, 2020
Communication to designated inventor
Mar 10, 2020
Communication to designated inventor
Mar 10, 2020
Communication to designated inventor
Mar 10, 2020
Communication to designated inventor
Jan 16, 2020
(Electronic) Receipt
Jan 16, 2020
Letter accompanying subsequently filed items
Dec 23, 2019
Abstract
Dec 23, 2019
Acknowledgement of receipt of electronic submission of the request for grant of a European patent
Dec 23, 2019
Claims
Dec 23, 2019
Description
Dec 23, 2019
Designation of inventor
Dec 23, 2019
Drawings
Dec 23, 2019
Request for grant of a European patent

EP3842861

IMEC VZW

Application Number: EP19219382A
Filing Date: Dec 23, 2019
Status: Granted And Under Opposition; Feb 7, 2025
Publication Date: Mar 12, 2025
External Links: Slate, Register , Google Patents

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A Method For Forming An Euvl Pellicle

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Dossier Documents

EP3842861