Bearing Apparatus And Vacuum Pump Apparatus
Patent No. EP3981986 (titled "Bearing Apparatus And Vacuum Pump Apparatus") was filed by Ebara on Dec 20, 2019. The application was issued on Feb 1, 2023.
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EP3981986
- Application Number
- EP21211707A
- Filing Date
- Dec 20, 2019
- Status
- Opposition Rejected
- Sep 26, 2025
- Publication Date
- Feb 1, 2023
- External Links
- Slate, Register , Google Patents