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Vacuum Pump Apparatus

Patent No. EP4067658 (titled "Vacuum Pump Apparatus") was filed by Ebara on Mar 24, 2022. The application was issued on Feb 12, 2025.

Patent Summary

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PFEIFFER VACUUMNov 5, 2025KNEFEL

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EP4067658

EBARA
Application Number
EP22164110A
Filing Date
Mar 24, 2022
Status
Granted And Under Opposition
Jan 10, 2025
Publication Date
Feb 12, 2025
External Links
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