Mems Device Having A Mechanical Barrier Structure
Patent No. EP4206120 (titled "Mems Device Having A Mechanical Barrier Structure") was filed by Infineon on Dec 29, 2021. The application was issued on Jul 5, 2023.
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EP4206120
- Application Number
- EP21218232A
- Filing Date
- Dec 29, 2021
- Status
- Intended To Grant
- Jul 30, 2025
- Publication Date
- Jul 5, 2023
- External Links
- Slate, Register , Google Patents