Petitioners' Updated Mandatory Notice | Apr 20, 2016 | PAPER | PETITIONER |
Petitioners (184) Updated Mandatory Notice | Feb 29, 2016 | PAPER | PETITIONER |
Power of Attorney | Nov 23, 2015 | PAPER | PATENT OWNER |
PO Notice of Appeal | Nov 23, 2015 | PAPER | PATENT OWNER |
Final Written Decision | Sep 30, 2015 | PAPER | BOARD |
Record of Oral Hearing | Aug 7, 2015 | PAPER | BOARD |
Notice of Patent Owner's Updated Exhbits List and Demonstrative Exhbits | May 25, 2015 | PAPER | PATENT OWNER |
Patent Owner's Demonstrative Exhibits | May 25, 2015 | EXHIBIT | PATENT OWNER |
Petitioner's Demonstratives for Oral Hearing | May 22, 2015 | PAPER | PETITIONER |
Petitioner's Response to Patent Owner's Motion for Observation | May 14, 2015 | PAPER | PETITIONER |
Dr. Bravman's Deposition Transcript and Signed Errata Sheet | May 14, 2015 | EXHIBIT | PETITIONER |
Order Requests for Oral Argument | May 8, 2015 | PAPER | BOARD |
Patent Owner's Observations | Apr 30, 2015 | PAPER | PATENT OWNER |
Patent Owner's Request For Hearing | Apr 30, 2015 | PAPER | PATENT OWNER |
Petitioner's Request for Oral Argument | Apr 30, 2015 | PAPER | PETITIONER |
Deposition of Dr. Bravman | Apr 30, 2015 | EXHIBIT | PATENT OWNER |
Notice of Deposition of Mr. Bravman | Apr 18, 2015 | PAPER | PATENT OWNER |
Decision Granting Motion for Pro Hac Vice Admission of Brett C. Rismiller | Apr 15, 2015 | PAPER | BOARD |
GF Motion for PHV Admission of Brett C. Rismiller | Apr 7, 2015 | PAPER | PETITIONER |
GF Rismiller Decl ISO Motion for PHV Admission of Brett C Rismiller | Apr 7, 2015 | EXHIBIT | PETITIONER |
Petitioner's Reply | Mar 31, 2015 | PAPER | PETITIONER |
Deposition Transcript of Larry D. Hartsough Ph.D. for U.S. Patent No. 6,896,775 (February 19, 2015) | Mar 31, 2015 | EXHIBIT | PETITIONER |
Deposition Transcript of Larry D. Hartsough Ph.D. for U.S. Patent No. 8,125,155 (February 12, 2015) | Mar 31, 2015 | EXHIBIT | PETITIONER |
Deposition Transcript of Larry D. Hartsough Ph.D. for U.S. Patent No. 7,808,184 (February 11, 2015) | Mar 31, 2015 | EXHIBIT | PETITIONER |
Declaration of John C. Bravman | Mar 31, 2015 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,896,775 | Mar 31, 2015 | EXHIBIT | PETITIONER |
Power of Attorney | Mar 30, 2015 | PAPER | PETITIONER |
Power of Attorney | Mar 30, 2015 | PAPER | PETITIONER |
Petitioner's Updated Mandatory Notice.pdf | Mar 30, 2015 | PAPER | PETITIONER |
Decision Granting Joint Motion to Terminate as to Petitioner TSMC | Mar 18, 2015 | PAPER | BOARD |
Decision Motion to Designate Lead Petitioner and Amend Scheduling Order | Mar 18, 2015 | PAPER | BOARD |
Motion To Designate Lead Petitioner and Amend Schedule | Mar 16, 2015 | PAPER | PATENT OWNER |
Order Conduct of the Proceeding | Mar 10, 2015 | PAPER | BOARD |
Joint Motion to Terminate | Mar 10, 2015 | PAPER | PETITIONER |
Joint Request to Maintain Confidentiality and to Keep Separate | Mar 10, 2015 | PAPER | PETITIONER |
TSMC-1026 - Stipulations of Dismissals | Mar 10, 2015 | EXHIBIT | PETITIONER |
TSMC-1027 - CONFIDENTIAL-BOARD-ONLY - Zond TSMC Settlement Agreement | Mar 10, 2015 | EXHIBIT | PETITIONER |
Petitioners Notice of Deposition of Larry D. Hartsough, Ph.D. | Feb 5, 2015 | PAPER | PETITIONER |
Notice of Stipulation to Extend Due Date | Jan 29, 2015 | PAPER | PETITIONER |
Patent Owner's Response | Dec 30, 2014 | PAPER | PATENT OWNER |
Weyrick | Dec 30, 2014 | EXHIBIT | PATENT OWNER |
Kuo | Dec 30, 2014 | EXHIBIT | PATENT OWNER |
Sinha | Dec 30, 2014 | EXHIBIT | PATENT OWNER |
DeVito Deposition of 11.20.24 | Dec 30, 2014 | EXHIBIT | PATENT OWNER |
Hartsough Declaration | Dec 30, 2014 | EXHIBIT | PATENT OWNER |
S.M. Rossnagel | Dec 30, 2014 | EXHIBIT | PATENT OWNER |
A. E. White Paper | Dec 30, 2014 | EXHIBIT | PATENT OWNER |
Kotshagen Deposition 12.3.14 | Dec 30, 2014 | EXHIBIT | PATENT OWNER |
DeVito Deposition 11.21.14 | Dec 30, 2014 | EXHIBIT | PATENT OWNER |
Eronini | Dec 30, 2014 | EXHIBIT | PATENT OWNER |
Notice of stipulation | Dec 22, 2014 | PAPER | PATENT OWNER |
Expunged | Dec 19, 2014 | PAPER | PATENT OWNER |
Decision Pro Hac Motion | Dec 1, 2014 | PAPER | BOARD |
Pro Hac Vice | Nov 26, 2014 | PAPER | PATENT OWNER |
Pro Hac Vice | Nov 26, 2014 | EXHIBIT | PATENT OWNER |
Decision on Motions to Expunge | Nov 14, 2014 | PAPER | BOARD |
Decision - Motions for Pro Hav Vice Admission | Nov 14, 2014 | PAPER | BOARD |
Deposition notice | Nov 14, 2014 | PAPER | PATENT OWNER |
Petitioners Updated Mandatory Notice | Nov 12, 2014 | PAPER | PETITIONER |
Motion pro hac vice | Nov 11, 2014 | PAPER | PATENT OWNER |
Motion pro hac vice | Nov 11, 2014 | PAPER | PATENT OWNER |
Motion to expunge | Nov 11, 2014 | PAPER | PATENT OWNER |
Exhibit rpo hac vice | Nov 11, 2014 | EXHIBIT | PATENT OWNER |
Exhibit pro hac vice | Nov 11, 2014 | EXHIBIT | PATENT OWNER |
Expunged | Nov 10, 2014 | PAPER | PATENT OWNER |
Expunged | Nov 10, 2014 | PAPER | PATENT OWNER |
Expunged | Nov 10, 2014 | PAPER | PATENT OWNER |
Expunged | Nov 10, 2014 | PAPER | PATENT OWNER |
Granting Revised Motion for Joinder | Nov 7, 2014 | PAPER | BOARD |
Decision Granting Revised Motion for Joinder | Nov 7, 2014 | PAPER | BOARD |
Decision - Motion for Pro Hac Vice Admission of Anthony J. Fitzpatrick | Nov 6, 2014 | PAPER | BOARD |
Order Conduct of the Proceeding | Nov 5, 2014 | PAPER | BOARD |
Petitioners' Motion for Pro Hac Vice Admission | Oct 28, 2014 | PAPER | PETITIONER |
1025 - Affidavit of Mr. Fitzpatrick in Support of Motion for Pro Hac Vice Admission | Oct 28, 2014 | EXHIBIT | PETITIONER |
Petitioners' Notice of Proposed Motions | Oct 24, 2014 | PAPER | PETITIONER |
Decision - Institution of Inter Partes Review 37 C.F.R. 42.108 | Oct 1, 2014 | PAPER | BOARD |
Scheduling Order | Oct 1, 2014 | PAPER | BOARD |
Decision - Motion for Joinder 37 C.F.R. 42.122 | Oct 1, 2014 | PAPER | BOARD |
Patent Owners Opposition To Motion For Joinder | Jul 15, 2014 | PAPER | PATENT OWNER |
Patent Owner Oppostion To Motion For Joinder | Jul 15, 2014 | PAPER | PATENT OWNER |
Patent Owner Preliminary Response | Jul 7, 2014 | PAPER | PATENT OWNER |
Petitioner's Motion for Joinder | Jun 30, 2014 | PAPER | PETITIONER |
Power of Attorney | Jun 12, 2014 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Related Matters | Jun 12, 2014 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Notice of filing Date Accorded to Petition | Jun 2, 2014 | PAPER | BOARD |
Petition for Inter Partes Review of USP 7808184 - Challenging Claims 1-5 and 11-15 | May 22, 2014 | PAPER | PETITIONER |
Power of Attorney | May 22, 2014 | PAPER | PETITIONER |
Exhibit 1001 - USP 7808184 | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1002 - DeVito Declaration | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1003 - Mozgrin, High-Current Low-Pressure | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1004 - Kudryavtsev, Ionization Relaxtion | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1005 - Wang USP 6413382 | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1006 - Mozgrin, High-Current (Manuscript) - Certified Translation | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1007 - Mozgrin Thesis (Original Russian) | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1008 - Catalogue Entry at the Russian State Library - Mozgrin Thesis | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1009 - Office Action 12-8-09 | May 22, 2014 | EXHIBIT | PETITIONER |
Exhbit 1010 - Response 6-3-10 | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1011 - Notice of Allowance 6-28-10 | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1012 - Manos, Plasma Etching | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1013 - Chistyakov USP 7147759 | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1014 - Response for RCE 5-2-06 | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1015 - Gudmundsson J. T., Evolution of the Electron Energy | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1016 - Thornton, Magnetron Sputtering | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1017 - European Patent Appln 1560943 Response 4-21-2008 | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1018 - Leipold, High Electron Density | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1019 - Claim Chart Mozgrin in view of Kudryavtsev | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1020 - Claim Chart Mozgrin in view of the Mozgrin Thesis | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1021 - Claim Chart Mozgrin in view of Kudryavtsev and Wang | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1022 - Claim Chart Mozgrin in view of the Mozgrin Thesis and further in view of Wang | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1023 - Claim Chart Wang in view of Kudryavtsev | May 22, 2014 | EXHIBIT | PETITIONER |
Exhibit 1024 - List of Related Litigations | May 22, 2014 | EXHIBIT | PETITIONER |