PO Notice of Appeal | Mar 7, 2016 | PAPER | PATENT OWNER |
Petitioners (652) Updated Mandatory Notice | Feb 29, 2016 | PAPER | PETITIONER |
Final Written Decision | Jan 5, 2016 | PAPER | BOARD |
Record of Oral Hearing | Nov 3, 2015 | PAPER | BOARD |
Power of Attorney | Aug 12, 2015 | PAPER | PATENT OWNER |
Patent Owner's Updated Mandatory Notices | Aug 12, 2015 | PAPER | PATENT OWNER |
Patent Owner's Updated Exhibit List | Aug 10, 2015 | PAPER | PATENT OWNER |
652 Petitioner Demonstratives (IPR2014-01088) | Aug 10, 2015 | PAPER | PETITIONER |
652 CORRECTED Petitioner Demonstratives (IPR2014-01088) | Aug 10, 2015 | PAPER | PETITIONER |
Ex. 2005 PO Demonstrative Exhibits | Aug 10, 2015 | EXHIBIT | PATENT OWNER |
652 Response to Motion for Observations (IPR2014-01088) | Jul 30, 2015 | PAPER | PETITIONER |
Order Trial Hearing | Jul 23, 2015 | PAPER | BOARD |
Patent Owner's Motion for Observations | Jul 20, 2015 | PAPER | PATENT OWNER |
Ex. 2003 Kortshagen Deposition 7-2-15 | Jul 20, 2015 | EXHIBIT | PATENT OWNER |
Patent Owner's request for Oral Hearing | Jul 17, 2015 | PAPER | PATENT OWNER |
652-IPR2014-01088 Petitioner Request for Oral Argument | Jul 10, 2015 | PAPER | PETITIONER |
652 Patent Reply Brief (IPR2014-01088) | Jun 26, 2015 | PAPER | PETITIONER |
Ex. 1020 - Supplemental Kortshagen Declaration | Jun 26, 2015 | EXHIBIT | PETITIONER |
Ex. 1021 - Deposition Transcript of Larry D. Hartsough Ph.D. for U.S. Patent No. 6,806,652 dated May 15, 2015 | Jun 26, 2015 | EXHIBIT | PETITIONER |
Patent Owner's Response to Petition | Mar 23, 2015 | PAPER | PATENT OWNER |
Ex. 2002 Declaration of Dr. Hartsough | Mar 23, 2015 | EXHIBIT | PATENT OWNER |
Decision Motion to Designate Lead Petitioner and Amend Scheduling Order | Mar 18, 2015 | PAPER | BOARD |
Motion to Designate Lead Petitioner and to Amend Scheduling Order | Mar 16, 2015 | PAPER | PETITIONER |
DECISION Motions for Pro Hac Vice Admission of Granovsky | Mar 2, 2015 | PAPER | BOARD |
PO Updated Mandatory Notices | Mar 1, 2015 | PAPER | PATENT OWNER |
NOTICE OF STIPULATION TO EXTEND DUE DATES | Feb 27, 2015 | PAPER | PATENT OWNER |
Notice of Deposition of Dr. Kortshagen | Feb 26, 2015 | PAPER | PATENT OWNER |
PO Motion PHV re Maria Granovsky | Feb 24, 2015 | PAPER | PATENT OWNER |
Ex. 2001 Affidavit of Maria Granovsky | Feb 24, 2015 | EXHIBIT | PATENT OWNER |
Order Conduct of the Proceeding | Feb 2, 2015 | PAPER | BOARD |
Notice to Extend Due Dates | Jan 29, 2015 | PAPER | PETITIONER |
Decision - Institution of Inter Partes Review 37 C.F.R. 42.108 | Jan 6, 2015 | PAPER | BOARD |
Decision - Motion for Joinder 37 C.F.R. 42.122 | Jan 6, 2015 | PAPER | BOARD |
Scheduling Order | Jan 6, 2015 | PAPER | BOARD |
Decision - Motions for Pro Hac Vice Admission of Mr. Brett C. Rismiller | Dec 3, 2014 | PAPER | BOARD |
Motion for PHV Admission of Brett C. Rismiller | Nov 21, 2014 | PAPER | PETITIONER |
Rismiller Declaration ISO Motion for PHV Admission of Brett C Rismiller | Nov 21, 2014 | EXHIBIT | PETITIONER |
Decision Motion to Withdraw | Nov 19, 2014 | PAPER | BOARD |
Power of Attorney | Nov 19, 2014 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Motion to withdraw | Nov 3, 2014 | PAPER | PATENT OWNER |
Preliminary response | Oct 7, 2014 | PAPER | PATENT OWNER |
Opposition to joinder | Sep 2, 2014 | PAPER | PATENT OWNER |
Petitioner Motion for Joinder Under 35 U.S.C. Section 315(c) and 37 C.F.R. Section 42.22 and Section 42.122(b) | Aug 18, 2014 | PAPER | PETITIONER |
Power of Attorney | Jul 25, 2014 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Related Matters | Jul 25, 2014 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Notice of Accepting Corrected Petition | Jul 22, 2014 | PAPER | BOARD |
'652 Revised Petition - Claims 1-17 - 1642930-0008-IPR2 | Jul 11, 2014 | PAPER | PETITIONER |
Revised-U.S. Patent No. 6,806,652 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-Kortshagen Declaration | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-D.V. Mozgrin, et al, High-Current Low-Pressure Quasi-Stationary Discharge in a Magnetic Field Experimental Research, Plasma Physics Reports, Vol. 21, No. 5, 1995 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-U.S. Pat. No. 6,413,382 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-D. W. Fahey, et al., High flux beam source of thermal rare-gas metastable atoms, J. Phys. E Sci. Insrum., Vol. 13, 1980 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-A. A. Kudryavtsev and V.N. Skerbov, Ionization relaxation in a plasma produced by a pulsed inert-gas discharge, Sov. Phys. Tech. Phys. 28(1), pp. 30-35, January 1983 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-Iwamura, U.S. Pat. No. 5,753,886 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-Vratny, U.S. Pat No. 3,461,054 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-Röepcke et al., Comparison of Optical Emission Spectrometric Measurements of the Concentration and Energy of Species in Low-pressure Microwave and Radiofrequency Plasma Sources, J. Analytical Atomic Spectrometry, Sept 1993, Vol. 8, pp. 803-808 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-J. Hopwood and J. Asmussen, Neutral gas temperatures in a multipolar electron cyclotron resonance plasma, Appl. Phys. Let. 58 (22), 2473-2475 (1991) | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-G. A. Hebner, Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas, J. Appl. Physics, 80 (5), 2624- 2636 (1996) | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-U.S. Patent No. 7,147,759 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-Lantsman, U.S. Pat. No. 6,190,512 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-Clarenbach, Time-dependent gas density and temperature measurements in pulsed helicon discharges in argon, Plasma Sources Sci. Technol. 12 (2003) 345-357 | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-Plaintiff Zond LLCs Preliminary Proposed Claim Constructions, Civil Action No. 13-cv-11634-WGY | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-The Materials Science of Thin Films, by Ohring M., Academic Press (1992) | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-Thin-Film Deposition Principles and Practice by Smith, D.L., McGraw Hill (1995) | Jul 11, 2014 | EXHIBIT | PETITIONER |
Revised-List of Related Litigations | Jul 11, 2014 | EXHIBIT | PETITIONER |
Notice of Filing Date Accorded to Petition | Jul 7, 2014 | PAPER | BOARD |
Power of Attorney | Jul 1, 2014 | PAPER | PETITIONER |
'652 Petition - Claims 1-17, 1642930-0008 IPR2 | Jul 1, 2014 | PAPER | PETITIONER |
U.S. Patent No. 6,806,652 | Jul 1, 2014 | EXHIBIT | PETITIONER |
Kortshagen Declaration | Jul 1, 2014 | EXHIBIT | PETITIONER |
D.V. Mozgrin, et al, High-Current Low-Pressure Quasi-Stationary Discharge in a Magnetic Field Experimental Research, Plasma Physics Reports, Vol. 21, No. 5, 1995 | Jul 1, 2014 | EXHIBIT | PETITIONER |
U.S. Pat. No. 6,413,382 | Jul 1, 2014 | EXHIBIT | PETITIONER |
D. W. Fahey, et al., High flux beam source of thermal rare-gas metastable atoms, J. Phys. E, Sci. Insrum., Vol. 13, | Jul 1, 2014 | EXHIBIT | PETITIONER |
A. A. Kudryavtsev and V.N. Skerbov, Ionization relaxation in a plasma produced by a pulsed inert-gas discharge, Sov. Phys. Tech. Phys. 28(1), pp. 30-35, January 1983 | Jul 1, 2014 | EXHIBIT | PETITIONER |
Iwamura, U.S. Pat. No. 5,753,886 | Jul 1, 2014 | EXHIBIT | PETITIONER |
Vratny, U.S. Pat No. 3,461,054 | Jul 1, 2014 | EXHIBIT | PETITIONER |
Röepcke et al., Comparison of Optical Emission Spectrometric Measurements of the Concentration and Energy of Species in Low-pressure Microwave and Radiofrequency Plasma Sources, J. Analytical Atomic Spectrometry, September 1993, Vol. 8, pp. 803-808 | Jul 1, 2014 | EXHIBIT | PETITIONER |
J. Hopwood and J. Asmussen, Neutral gas temperatures in a multipolar electron cyclotron resonance plasma, Appl. Phys. Let. 58 (22), 2473-2475 (1991) | Jul 1, 2014 | EXHIBIT | PETITIONER |
G. A. Hebner, Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas, J. Appl. Physics, 80 (5), 2624- 2636 (1996) | Jul 1, 2014 | EXHIBIT | PETITIONER |
U.S. Patent No. 7,147,759 | Jul 1, 2014 | EXHIBIT | PETITIONER |
Lantsman, U.S. Pat. No. 6,190,512 | Jul 1, 2014 | EXHIBIT | PETITIONER |
Clarenbach, Time-dependent gas density and temperature measurements in pulsed helicon discharges in argon, Plasma Sources Sci. Technol. 12 (2003) 345-357 | Jul 1, 2014 | EXHIBIT | PETITIONER |
Plaintiff Zond LLCs Preliminary Proposed Claim Constructions, Civil Action No. 13-cv-11634-WGY | Jul 1, 2014 | EXHIBIT | PETITIONER |
The Materials Science of Thin Films, by Ohring M., Academic Press (1992) | Jul 1, 2014 | EXHIBIT | PETITIONER |
Thin-Film Deposition Principles and Practice by Smith, D.L., McGraw Hill (1995) | Jul 1, 2014 | EXHIBIT | PETITIONER |
List of Related Litigations | Jul 1, 2014 | EXHIBIT | PETITIONER |