Final Written Decision | Jun 13, 2016 | PAPER | BOARD |
Record of Oral Hearing | Apr 13, 2016 | PAPER | BOARD |
Order Rescheduling Oral Hearing | Jan 28, 2016 | PAPER | BOARD |
Patent Owner's Demonstrative Exhibits | Jan 21, 2016 | PAPER | PATENT OWNER |
Petitioner's Updated Exhibit List | Jan 21, 2016 | PAPER | PETITIONER |
Petitioner's Demonstratives for Oral Hearing | Jan 21, 2016 | EXHIBIT | PETITIONER |
Patent Owner's Demonstrative Exhibits | Jan 21, 2016 | EXHIBIT | PATENT OWNER |
Petitioner Response to Patent Owners Motion for Observation on Cross-Examination | Jan 12, 2016 | PAPER | PETITIONER |
Order - Oral Hearing | Jan 11, 2016 | PAPER | BOARD |
Request for Oral Argument | Jan 4, 2016 | PAPER | PETITIONER |
Request for Oral Argument | Jan 4, 2016 | PAPER | PATENT OWNER |
Motion for Observation Regarding Cross-Examination of Dr. Gary W. Rubloff | Jan 4, 2016 | PAPER | PATENT OWNER |
Deposition Transcript of Dr. Rubloff Vol. 1 December 16, 2015 | Jan 4, 2016 | EXHIBIT | PATENT OWNER |
Deposition Transcript of Dr. Rubloff Vol. 2 December 17, 2015 | Jan 4, 2016 | EXHIBIT | PATENT OWNER |
Notice of Deposition of Gary W. Rubloff, Ph.D. | Dec 3, 2015 | PAPER | PATENT OWNER |
Petitioners Reply to Patent Owners Response | Nov 16, 2015 | PAPER | PETITIONER |
Rubloff Declaration | Nov 16, 2015 | EXHIBIT | PETITIONER |
Maltiel, Ron Deposition - Vol 1 | Nov 16, 2015 | EXHIBIT | PETITIONER |
Maltiel, Ron Deposition - Vol 2 | Nov 16, 2015 | EXHIBIT | PETITIONER |
Hasper | Nov 16, 2015 | EXHIBIT | PETITIONER |
US5043299 Chang | Nov 16, 2015 | EXHIBIT | PETITIONER |
Notice of Additional Back-Up Counsel | Nov 3, 2015 | PAPER | PETITIONER |
Notice of Deposition | Nov 3, 2015 | PAPER | PETITIONER |
Petitioner's Notice of Objection to Evidence | Sep 8, 2015 | PAPER | PETITIONER |
Patent Owner Response to Petition for Inter Partes Review | Aug 31, 2015 | PAPER | PATENT OWNER |
Declaration of R. Maltiel in support of Patent Owner's Response to Petition | Aug 31, 2015 | EXHIBIT | PATENT OWNER |
R. Maltiel Curriculum Vitae | Aug 31, 2015 | EXHIBIT | PATENT OWNER |
Deposition Transcript of Dr. Rubloff Vol. 1 August 18, 2015 | Aug 31, 2015 | EXHIBIT | PATENT OWNER |
Deposition Transcript of Dr. Rubloff Vol. 2 August 19, 2015 | Aug 31, 2015 | EXHIBIT | PATENT OWNER |
Article, Study on the Oxidation and Reduction of Tungsten Surface | Aug 31, 2015 | EXHIBIT | PATENT OWNER |
Website, Process Tungsten CVD | Aug 31, 2015 | EXHIBIT | PATENT OWNER |
Updated Mandatory Notice | Aug 14, 2015 | PAPER | PETITIONER |
DECISION Granting Patent Owner's Motions for Pro Hac Vice Admission of Mr. Chen | Aug 12, 2015 | PAPER | BOARD |
Patent Owner's Motion for Pro Hac Vice Admission of Jerry Chen | Aug 11, 2015 | PAPER | PATENT OWNER |
Declaration of Jerry Chen in Support of Patent Owner's Motion for Pro Hac Vice Admission | Aug 11, 2015 | EXHIBIT | PATENT OWNER |
Notice of Deposition of Gary W. Rubloff, Ph.D. | Aug 4, 2015 | PAPER | PATENT OWNER |
Decision - Institution of Inter Partes Review - 37 CFR 42.108 | Jun 17, 2015 | PAPER | BOARD |
Scheduling Order | Jun 17, 2015 | PAPER | BOARD |
Decision - Granting Motion to Correct Filing Date Recorded in PRPS 37 C.F.R. 42.6 | Jan 30, 2015 | PAPER | BOARD |
Exhibit 3001 | Jan 30, 2015 | EXHIBIT | BOARD |
Petitioners updated mandatory notice | Jan 21, 2015 | PAPER | PETITIONER |
Mandatory Notices and Designation of Counsel | Jan 20, 2015 | PAPER | PATENT OWNER |
Opposition to Petitioner's Motion to Correct Filing Date | Jan 20, 2015 | PAPER | PATENT OWNER |
Power of Attorney | Jan 16, 2015 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Related Matters | Jan 16, 2015 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Notice of Filing Date Accorded to Petition | Jan 14, 2015 | PAPER | BOARD |
Power of Attorney | Dec 19, 2014 | PAPER | PETITIONER |
Motion to Correct PRPS Filing Date | Dec 19, 2014 | PAPER | PETITIONER |
Petiton for Inter Partes | Dec 17, 2014 | PAPER | PETITIONER |
U.S. Patent Number 6,030,893 | Dec 17, 2014 | EXHIBIT | PETITIONER |
Excerpts from the Prosecution History of the 893 Patent | Dec 17, 2014 | EXHIBIT | PETITIONER |
Declaration of Dr. Gary W. Rubloff | Dec 17, 2014 | EXHIBIT | PETITIONER |
Curriculum Vitae of Dr. Gary W. Rubloff | Dec 17, 2014 | EXHIBIT | PETITIONER |
U.S. Patent Number 5,843,840 | Dec 17, 2014 | EXHIBIT | PETITIONER |
Excerpts from Introduction to Microelectronic Fabrication by R.C. Jaeger | Dec 17, 2014 | EXHIBIT | PETITIONER |
Excerpts from WEBSTER'S THIRD NEW INTERNATIONAL DICTIONARY | Dec 17, 2014 | EXHIBIT | PETITIONER |
U.S. Patent Number 5,953,631 | Dec 17, 2014 | EXHIBIT | PETITIONER |
U.S. Patent Number 5,407,698 | Dec 17, 2014 | EXHIBIT | PETITIONER |
AN INTEGRATED TUNGSTEN PLUG FABRICATION PROCESS, Conference Proceedings ULSI-VII | Dec 17, 2014 | EXHIBIT | PETITIONER |
U.S. Patent Number 5,968,847 | Dec 17, 2014 | EXHIBIT | PETITIONER |
U.S. Patent Number 6,352,403 | Dec 17, 2014 | EXHIBIT | PETITIONER |
U.S. Patent Number 5,292,554 | Dec 17, 2014 | EXHIBIT | PETITIONER |
Applied Materials Article on the P5000 CVD system | Dec 17, 2014 | EXHIBIT | PETITIONER |
Excerpts from Silicon Processing for the VLSI Era, Volume 1 Processing Technology, by S. Wolf | Dec 17, 2014 | EXHIBIT | PETITIONER |
INTERCONNECTS FOR ULSI STATE OF THE ART AND FUTURE TRENDS, Solid State Device Research Conference | Dec 17, 2014 | EXHIBIT | PETITIONER |
Selective LPCVD of Tungsten, J. Electrochem | Dec 17, 2014 | EXHIBIT | PETITIONER |
U.S. District Court District of Delaware Wilmington CIVIL DOCKET FOR CASE 1 13-cv-02033-RGA | Dec 17, 2014 | EXHIBIT | PETITIONER |