Petitioners' Notice of Appeal | Aug 24, 2017 | PAPER | PETITIONER |
Final Written Decision | Jun 23, 2017 | PAPER | BOARD |
Record of Oral Hearing | May 12, 2017 | PAPER | BOARD |
Revised Trial Order | Mar 15, 2017 | PAPER | BOARD |
Order - Trial Hearing | Mar 7, 2017 | PAPER | BOARD |
Patent Owner's Request for Oral Hearing | Feb 24, 2017 | PAPER | PATENT OWNER |
Petitioner's Request for Oral Argument | Feb 24, 2017 | PAPER | PETITIONER |
Patent Owner's Objection to Evidence | Feb 13, 2017 | PAPER | PATENT OWNER |
Petitioner's Reply to Patent Owner's Response | Feb 6, 2017 | PAPER | PETITIONER |
Ex. 1080 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Ex. 1084 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Ex. 1081 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Ex. 1082 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Ex. 1083 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Ex. 1090 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Ex. 1085 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Ex. 1086 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Ex. 1087 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Ex. 1088 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Ex. 1089 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Notice of Deposition of Dr. Alexander D. Glew | Dec 19, 2016 | PAPER | PETITIONER |
Notice of Second Joint Stipulation to Adjust Schedule | Dec 19, 2016 | PAPER | PETITIONER |
STANLEY WOLF, SILICON PROCESSING FOR THE VLSI ERA - VOLUME 2: PROCESS INTEGRATION (1990) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
PETER VAN ZANT, MICROCHIP FABRICATION (4th ed., 2000) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) (Part 2) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
SILICON NITRIDE AND SILICON DIOXIDE THIN INSULATING FILMS (M.J. Dean, et al. eds., 1997) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 1) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 2) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 3) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 4) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 5) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Silicon dioxide - Wikipedia | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Transcript of Deposition of Paul D. Franzon, Ph.D. ¿¿¿ October 6, 2016 | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Flexible and Substantial excerpts from the Oxford American Dictionary of Current English (1999) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) (Part 1) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Prosecution History of U.S. Application 12/497,652 ¿¿¿ Response to Office Action dated July 17, 2012 | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Prosecution History of U.S. Application 12/497,652 ¿¿¿ Office Action mailed on May 20, 2014 | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
HANDBOOK SEMICONDUCTOR MANUFACTURING TECHNOLOGY (Robert Doering & Yoshio Nishi eds., 2nd ed. 2008) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Declaration of Alexander D. Glew, PH.D. | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Petitioner's Updated Mandatory Notices | Oct 25, 2016 | PAPER | PETITIONER |
Petitioner's Objections to Patent Owner's Evidence | Oct 21, 2016 | PAPER | PETITIONER |
Exhibit 2146 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2158 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Patent Owner's Response | Oct 14, 2016 | PAPER | PATENT OWNER |
Exhibit 2159 (Part 2) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2162 (Part 2) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2162 (Part 3) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2162 (Part 5) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2163 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2164 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2165 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2166 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2169 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Patent Owner's Update Exhibit List | Oct 14, 2016 | PAPER | PATENT OWNER |
Exhibit 2159 (Part 1) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2160 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2162 (Part 1) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2162 (Part 4) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2167 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2168 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Order - Petitioner's Motion for Pro Hac Vice Admission of Mr. Harold Davis | Oct 4, 2016 | PAPER | BOARD |
Order - Petitioner's Pro Hac Vice Motion for Mr. Andrew B. Grossman | Oct 4, 2016 | PAPER | BOARD |
Power of Attorney for Petitioner SK Hynix Inc. | Sep 30, 2016 | PAPER | PETITIONER |
Power of Attorney for Petitioner Samsung Electronics Co., Ltd. | Sep 30, 2016 | PAPER | PETITIONER |
Power of Attorney for Petitioner Micron Technology, Inc. | Sep 30, 2016 | PAPER | PETITIONER |
Ex. 1078 | Sep 30, 2016 | EXHIBIT | PETITIONER |
Petitioner's Updated Exhibit List | Sep 30, 2016 | PAPER | PETITIONER |
Petitioner's Motion for Admission Pro Hac Vice of Andrew B. Grossman | Sep 30, 2016 | PAPER | PETITIONER |
Petitioner's Motion for Admission Pro Hac Vice of Harold H. Davis, Jr. | Sep 30, 2016 | PAPER | PETITIONER |
Ex. 1077 | Sep 30, 2016 | EXHIBIT | PETITIONER |
Patent Owner's Updated Mandatory Notices | Sep 26, 2016 | PAPER | PATENT OWNER |
Decision - Patent Owner's Motion for Withdrawal and Substitution of Counsel | Sep 20, 2016 | PAPER | BOARD |
Decision - Patent Owner's Mot. Pro Hac Vice Admis. Mr. Michael C. Newman | Sep 20, 2016 | PAPER | BOARD |
Amended Notice of Deposition of Dr. Paul D. Franzon | Sep 16, 2016 | PAPER | PATENT OWNER |
Patent Owner's Updated Exhibit List | Sep 16, 2016 | PAPER | PATENT OWNER |
Patent Owner's Updated Exhibit List | Sep 16, 2016 | PAPER | PATENT OWNER |
Patent Owners Motion for Withdrawal and Substitution of Counsel | Sep 16, 2016 | PAPER | PATENT OWNER |
Notice of Joint Stipulation to Adjust Schedule | Sep 15, 2016 | PAPER | PATENT OWNER |
Exhibit 2155 - Declaration of Michael C. Newman in Support of PHV | Sep 13, 2016 | EXHIBIT | PATENT OWNER |
Unopposed Motion for Pro Hac Vice Admission of Michael C. Newman | Sep 13, 2016 | PAPER | PATENT OWNER |
Patent Owners Power of Attorney | Sep 7, 2016 | PAPER | PATENT OWNER |
Patent Owners Supplemental Mandatory Notices | Sep 7, 2016 | PAPER | PATENT OWNER |
Notice of Deposition | Sep 6, 2016 | PAPER | PATENT OWNER |
Petitioner's Updated Mandatory Notices | Aug 25, 2016 | PAPER | PETITIONER |
Petitioner's Updated Exhibit LIst | Aug 25, 2016 | PAPER | PETITIONER |
Exhibit 1068 | Aug 25, 2016 | EXHIBIT | PETITIONER |
Petitioner's Updated Exhibit LIst | Aug 22, 2016 | PAPER | PETITIONER |
Exhibit 1067 | Aug 22, 2016 | EXHIBIT | PETITIONER |
Decision - 37 C.F.R. 42.20 | Aug 11, 2016 | PAPER | BOARD |
Summary of Conference Call | Aug 8, 2016 | PAPER | BOARD |
Revised Scheduling Order | Aug 8, 2016 | PAPER | BOARD |
Petitioner's Response to Patent Owner's Motion Regarding Claim Construction | Jul 27, 2016 | PAPER | PETITIONER |
Notice Correcting Certificates of Service | Jul 19, 2016 | PAPER | PATENT OWNER |
Exhibit 2154 | Jul 18, 2016 | EXHIBIT | PATENT OWNER |
Patent Owner Elm Motion Regarding Claim Construction | Jul 18, 2016 | PAPER | PATENT OWNER |
Notice of Patent Expiration | Jul 18, 2016 | PAPER | PATENT OWNER |
Petitioner's Objections to Patent Owner's Evidence | Jul 15, 2016 | PAPER | PETITIONER |
Patent Owner¿¿¿s Objections To Petitioners¿¿¿ Evidence | Jul 15, 2016 | PAPER | PATENT OWNER |
Petitioner's Updated Mandatory Notices | Jul 8, 2016 | PAPER | PETITIONER |
Scheduling Order | Jul 1, 2016 | PAPER | BOARD |
Order - Patent Owners Motion for Pro Hac Vice Admission of Samuel L. Walling | Jul 1, 2016 | PAPER | BOARD |
Order- Conduct of the Proceeding | Jul 1, 2016 | PAPER | BOARD |
Decision - Institution of Inter Partes Review | Jun 30, 2016 | PAPER | BOARD |
USPTO - Dec. 22, 2015 Power Outage Updates | Jun 30, 2016 | EXHIBIT | BOARD |
Elm 3DS Innovations LLC's Motion for Pro Hac Vice Admission of Samuel L. Walling and Declaration of Samuel L. Walling in Support of Motion | May 6, 2016 | PAPER | PATENT OWNER |
Power of Attorney | May 5, 2016 | PAPER | PATENT OWNER |
Preliminary Patent Owner Response | Apr 5, 2016 | PAPER | PATENT OWNER |
Ex. 2100 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2101 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2102 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2103 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2104 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2105 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2106 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2107 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2108 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2109 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2115 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2116 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2117 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2118 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2119 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2120 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2121 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2122 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2123 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2125 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2127 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2131 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2132 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2133 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2134 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2135 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2136 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2137 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2143 | Apr 5, 2016 | EXHIBIT | PATENT OWNER |
Related Matters | Jan 19, 2016 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Power of Attorney | Jan 19, 2016 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Petitioner's Notice of Amended Exhibit List | Jan 13, 2016 | PAPER | PETITIONER |
Petitioner's Amended Exhibit List | Jan 13, 2016 | PAPER | PETITIONER |
Notice of Filing Date Accorded to Petition and Time for Filing Patent Owner Preliminary Response | Jan 6, 2016 | PAPER | BOARD |
Petition for IPR of U.S. Patent No. 8,841,778 | Dec 28, 2015 | PAPER | PETITIONER |
Power of Attorney | Dec 28, 2015 | PAPER | PETITIONER |
Power of Attorney | Dec 28, 2015 | PAPER | PETITIONER |
Power of Attorney | Dec 28, 2015 | PAPER | PETITIONER |
U.S. Patent No. 8,841,778 | Dec 28, 2015 | EXHIBIT | PETITIONER |
Declaration of Dr. Paul D. Franzon | Dec 28, 2015 | EXHIBIT | PETITIONER |
Cirriculum Vitae of Dr. Paul D. Franzon | Dec 28, 2015 | EXHIBIT | PETITIONER |
USP 5202754 (Bertin) | Dec 28, 2015 | EXHIBIT | PETITIONER |
USP 5162251 (Poole) | Dec 28, 2015 | EXHIBIT | PETITIONER |
USP 5354695 (Leedy) | Dec 28, 2015 | EXHIBIT | PETITIONER |
JP Pub 3-151337 (Kowa) | Dec 28, 2015 | EXHIBIT | PETITIONER |
USP 5627106 (Hsu) | Dec 28, 2015 | EXHIBIT | PETITIONER |
U.S. Patent No. 8,841,778 - File History | Dec 28, 2015 | EXHIBIT | PETITIONER |
499 Patent FH - 5-29-13 OA | Dec 28, 2015 | EXHIBIT | PETITIONER |
499 Patent FH - 6-20-13 OA | Dec 28, 2015 | EXHIBIT | PETITIONER |
499 Patent FH - As-Filed Application | Dec 28, 2015 | EXHIBIT | PETITIONER |
652 App FH - 9-26-13 Response | Dec 28, 2015 | EXHIBIT | PETITIONER |
653 App FH - 10-24-13 Response | Dec 28, 2015 | EXHIBIT | PETITIONER |
652 App FH - 4-5-13 Response | Dec 28, 2015 | EXHIBIT | PETITIONER |
167 Patent FH - 4-28-98 Response | Dec 28, 2015 | EXHIBIT | PETITIONER |
167 Patent FH - 9-8-98 Response | Dec 28, 2015 | EXHIBIT | PETITIONER |
542 Patent FH - 7-30-12 Response | Dec 28, 2015 | EXHIBIT | PETITIONER |
466 Patent FH - 2-16-09 Response | Dec 28, 2015 | EXHIBIT | PETITIONER |
466 Patent Fh - 6-25-09 Response | Dec 28, 2015 | EXHIBIT | PETITIONER |
119 Patent FH - 9-4-12 Response | Dec 28, 2015 | EXHIBIT | PETITIONER |
119 Patent FH - 6-3-13 Appeal Brief | Dec 28, 2015 | EXHIBIT | PETITIONER |
617 Patent FH - 12-13-10 Response | Dec 28, 2015 | EXHIBIT | PETITIONER |
652 App FH - 8-27-14 OA | Dec 28, 2015 | EXHIBIT | PETITIONER |
652 App FH - 11-20-14 Express Abandonment | Dec 28, 2015 | EXHIBIT | PETITIONER |
653 App FH - 8-27-14 Adv. Action | Dec 28, 2015 | EXHIBIT | PETITIONER |
653 App FH - 11-20-14 Express Abandonment | Dec 28, 2015 | EXHIBIT | PETITIONER |
Concept One CVS System Specification | Dec 28, 2015 | EXHIBIT | PETITIONER |
Processing for the VLSI Era (Wolf) | Dec 28, 2015 | EXHIBIT | PETITIONER |
USP 3508980 (Jackson) | Dec 28, 2015 | EXHIBIT | PETITIONER |
USP 3044909 (Shockley) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Stress-Induced Dislocations (Fahey) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Physics of Thin Films (Hass) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Stress in Thermal SiO2 During Growth (EerNisse) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Delamination and fracture of thin films (Klokholm) | Dec 28, 2015 | EXHIBIT | PETITIONER |
USP 4948482 (Kobayashi) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Dielectric Film Influence (Isobe) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Advantages of Dual Frequency PECVD (VandeVen) | Dec 28, 2015 | EXHIBIT | PETITIONER |
USP 5160998 (Itoh) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Polymer Dielectrics For Multichip Module Packaging (Garrou) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Warpage and Mechanical Strength Studies (Grief) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Japan's Push into Creative Semiconductor Research (Tatsuno) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Three-Dimensional IC Trends (Akasaka) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Evaluatoin of Cubic Devices (Hayashi) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Future WSI Technology (Williams) | Dec 28, 2015 | EXHIBIT | PETITIONER |
3-D Multichip Packaging (Crowley) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Memory-Chip Stacks Send Density Skyward (Malinak) | Dec 28, 2015 | EXHIBIT | PETITIONER |
Interconnect Capacitances (Kuhn) | Dec 28, 2015 | EXHIBIT | PETITIONER |