Final Written Decision | Jun 23, 2017 | PAPER | BOARD |
Record of Oral Hearing | May 12, 2017 | PAPER | BOARD |
Revised Trial Order | Mar 15, 2017 | PAPER | BOARD |
Order - Trial Hearing | Mar 7, 2017 | PAPER | BOARD |
Patent Owner's Request for Oral Hearing | Feb 24, 2017 | PAPER | PATENT OWNER |
Petitioner's Request for Oral Argument | Feb 24, 2017 | PAPER | PETITIONER |
Patent Owner's Objection to Evidence | Feb 13, 2017 | PAPER | PATENT OWNER |
U.S. Patent No. 6,204,174 to Glew et al., issued March 20, 2001 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Deposition Transcript of Alexander D. Glew, Ph.D. (January 20, 2017) | Feb 6, 2017 | EXHIBIT | PETITIONER |
Wang et al., Characteristics of CMOS Devices Fabricated Using High Quality Thin PECVD Gate Oxide, IEDM ¿¿¿89:463-466 (Dec. 1989) | Feb 6, 2017 | EXHIBIT | PETITIONER |
Alexander David Glew, Plasma Deposition of Diamond-Like Carbon and Fluorinated Amorphouse Carbon and the Resultant Properties and Structure (Dec. 2002), UMI No. 3085291 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Chanana, et al., Effect of Annealing and Plasma Precleaning on the Electrical Properties of N2/SiH4 PECVD Oxide as Gate Material in Mosfets and CCDs, Solid State Electronics, 36(7):1021-1026 (1993) | Feb 6, 2017 | EXHIBIT | PETITIONER |
Milton Ohring, The Materials Science of Thin Films, pp. 355-402 (Academic Press 1992) | Feb 6, 2017 | EXHIBIT | PETITIONER |
Guldi, R.L., Source/Drain Dislocations and Electrical Leakage in Titanium-Salicided CMOS Integrated Circuits¿¿¿ J. Electrochem. Soc. 141(7):1957-1963 (July 1994) | Feb 6, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 8,907,499 to Leedy, issued December 9, 2014 | Feb 6, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 4,717,448 to Cox et al., issued January 5, 1998 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Schubert, P.J., and Neudeck, G.W., Confined Lateral Selective Epitaxial Growth of Silicon for Device Fabrication, IEEE Electronic Devices Letters 11(5):181-183 (May 1990) | Feb 6, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 7,485,571 to Leedy, issued February 3, 2009 | Feb 6, 2017 | EXHIBIT | PETITIONER |
Petitioner's Reply to Patent Owner's Response | Feb 6, 2017 | PAPER | PETITIONER |
Notice of Deposition of Dr. Alexander D. Glew | Dec 19, 2016 | PAPER | PETITIONER |
Notice of Second Joint Stipulation to Adjust Schedule | Dec 19, 2016 | PAPER | PETITIONER |
STANLEY WOLF, SILICON PROCESSING FOR THE VLSI ERA - VOLUME 2: PROCESS INTEGRATION (1990) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) (Part 1) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) (Part 2) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
SILICON NITRIDE AND SILICON DIOXIDE THIN INSULATING FILMS (M.J. Dean, et al. eds., 1997) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 5) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Declaration of Alexander D. Glew, PH.D. | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Prosecution History of U.S. Application 12/497,652 ¿¿¿ Response to Office Action dated July 17, 2012 | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
HANDBOOK SEMICONDUCTOR MANUFACTURING TECHNOLOGY (Robert Doering & Yoshio Nishi eds., 2nd ed. 2008) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
PETER VAN ZANT, MICROCHIP FABRICATION (4th ed., 2000) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 1) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 2) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 3) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 4) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Silicon dioxide - Wikipedia | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Transcript of Deposition of Paul D. Franzon, Ph.D. ¿¿¿ October 6, 2016 | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Flexible and Substantial excerpts from the Oxford American Dictionary of Current English (1999) | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Prosecution History of U.S. Application 12/497,652 ¿¿¿ Office Action mailed on May 20, 2014 | Dec 9, 2016 | EXHIBIT | PATENT OWNER |
Petitioner's Updated Mandatory Notices | Oct 25, 2016 | PAPER | PETITIONER |
Petitioner's Objections to Patent Owner's Evidence | Oct 21, 2016 | PAPER | PETITIONER |
Microchip Fabrication | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
2159 (Part 2) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2160 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
2162 (Part 1) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2162 (Part 5) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2163 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2164 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Patent Owner's Response | Oct 14, 2016 | PAPER | PATENT OWNER |
Silicon Processing | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2159 (Part 1) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2162 (Part 2) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2162 (Part 3) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2162 (Part 4) | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2166 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2167 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2168 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2165 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2169 | Oct 14, 2016 | EXHIBIT | PATENT OWNER |
Patent Owner's Updated Exhibit List | Oct 14, 2016 | PAPER | PATENT OWNER |
Order - Petitioner's Motion for Pro Hac Vice Admission of Mr. Harold Davis | Oct 4, 2016 | PAPER | BOARD |
Order - Petitioner's Pro Hac Vice Motion for Mr. Andrew B. Grossman | Oct 4, 2016 | PAPER | BOARD |
Power of Attorney for Petitioner SK Hynix Inc. | Sep 30, 2016 | PAPER | PETITIONER |
Power of Attorney for Petitioner Micron Technology, Inc. | Sep 30, 2016 | PAPER | PETITIONER |
Power of Attorney for Petitioner Samsung Electronics Co., Ltd. | Sep 30, 2016 | PAPER | PETITIONER |
Petitioner's Motion for Admission Pro Hac Vice of Andrew B. Grossman | Sep 30, 2016 | PAPER | PETITIONER |
Petitioner's Motion for Admission Pro Hac Vice of Harold H. Davis, Jr. | Sep 30, 2016 | PAPER | PETITIONER |
Ex. 1077 | Sep 30, 2016 | EXHIBIT | PETITIONER |
Ex. 1078 | Sep 30, 2016 | EXHIBIT | PETITIONER |
Petitioner's Updated Exhibit List | Sep 30, 2016 | PAPER | PETITIONER |
Patent Owner's Updated Mandatory Notices | Sep 26, 2016 | PAPER | PATENT OWNER |
Decision - Patent Owner's Motion for Withdrawal and Substitution of Counsel | Sep 20, 2016 | PAPER | BOARD |
Decision - Patent Owner's Mot. Pro Hac Vice Admis. Mr. Michael C. Newman | Sep 20, 2016 | PAPER | BOARD |
Amended Notice of Deposition of Dr. Paul D. Franzon | Sep 16, 2016 | PAPER | PATENT OWNER |
Patent Owner's Updated Exhibit List | Sep 16, 2016 | PAPER | PATENT OWNER |
Patent Owners Motion for Withdrawal and Substitution of Counsel | Sep 16, 2016 | PAPER | PATENT OWNER |
Unopposed Motion for Pro Hac Vice Admission of Michael C. Newman | Sep 15, 2016 | PAPER | PATENT OWNER |
Exhibit 2157 - Declaration of Michael C. Newman in Support of PHV | Sep 15, 2016 | EXHIBIT | PATENT OWNER |
Notice of Joint Stipulation to Adjust Schedule | Sep 15, 2016 | PAPER | PATENT OWNER |
Patent Owners Power of Attorney | Sep 7, 2016 | PAPER | PATENT OWNER |
Patent Owners Supplemental Mandatory Notices | Sep 7, 2016 | PAPER | PATENT OWNER |
Notice of Deposition | Sep 6, 2016 | PAPER | PATENT OWNER |
Petitioner's Updated Exhibit List | Aug 25, 2016 | PAPER | PETITIONER |
Petitioner's Updated Mandatory Notices | Aug 25, 2016 | PAPER | PETITIONER |
Exhibit 1068 | Aug 25, 2016 | EXHIBIT | PETITIONER |
Exhibit 1067 | Aug 22, 2016 | EXHIBIT | PETITIONER |
Petitioner's Updated Exhibit LIst | Aug 22, 2016 | PAPER | PETITIONER |
Decision - 37 C.F.R. 42.20 | Aug 11, 2016 | PAPER | BOARD |
Summary of Conference Call | Aug 8, 2016 | PAPER | BOARD |
Revised Scheduling Order | Aug 8, 2016 | PAPER | BOARD |
Patent Owner Elm 3DS Innovations, LLC's Reply Regarding Claim Construction | Aug 1, 2016 | PAPER | PATENT OWNER |
Petitioner's Response to Patent Owner's Motion Regarding Claim Construction | Jul 27, 2016 | PAPER | PETITIONER |
Exhibit 1064 | Jul 27, 2016 | EXHIBIT | PETITIONER |
Petitioner's Updated Exhibit List | Jul 27, 2016 | PAPER | PETITIONER |
Notice Correcting Certificate of Service | Jul 19, 2016 | PAPER | PATENT OWNER |
Notice of Patent Expiration | Jul 18, 2016 | PAPER | PATENT OWNER |
Exhibit 2156 | Jul 18, 2016 | EXHIBIT | PATENT OWNER |
Patent Owner Elm Motion Regarding Claim Construction | Jul 18, 2016 | PAPER | PATENT OWNER |
Petitioner's Objections to Patent Owner's Evidence | Jul 15, 2016 | PAPER | PETITIONER |
Patent Owners Objections To Petitioners Evidence | Jul 15, 2016 | PAPER | PATENT OWNER |
Petitioner's Updated Mandatory Notices | Jul 8, 2016 | PAPER | PETITIONER |
Scheduling Order | Jul 1, 2016 | PAPER | BOARD |
Order - Patent Owners Motion for Pro Hac Vice Admission of Samuel L. Walling | Jul 1, 2016 | PAPER | BOARD |
Order- Conduct of the Proceeding | Jul 1, 2016 | PAPER | BOARD |
Decision - Institution of Inter Partes Review - 37 CFR 42.108 | Jun 30, 2016 | PAPER | BOARD |
Exhibit 3001 | Jun 30, 2016 | EXHIBIT | BOARD |
Elm 3DS Innovations LLC's Motion for Pro Hac Vice Admission of Samuel L. Walling and Declaration of Samuel L. Walling in Support of Motion | May 6, 2016 | PAPER | PATENT OWNER |
Power of Attorney | May 5, 2016 | PAPER | PATENT OWNER |
Patent Owner Preliminary Response | Apr 4, 2016 | PAPER | PATENT OWNER |
Ex. 2100 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2101 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2102 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2103 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2104 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2105 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2106 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2107 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2108 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2109 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2115 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2116 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2117 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2118 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2119 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2120 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2121 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2122 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2123 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2125 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2127 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2133 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2135 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2136 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2137 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2138 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2141 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2142 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2143 | Apr 4, 2016 | EXHIBIT | PATENT OWNER |
Power of Attorney | Jan 19, 2016 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Related Matters | Jan 19, 2016 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Notice of Accepting Corrected Petition | Jan 13, 2016 | PAPER | BOARD |
Petitioner's Response to Notice of Filing Date Accorded to Petition | Jan 11, 2016 | PAPER | PETITIONER |
Petitioner's Corrected Exhibit List | Jan 11, 2016 | PAPER | PETITIONER |
Notice of Filing Date Accorded to Petition | Jan 5, 2016 | PAPER | BOARD |
Power of Attorney | Dec 28, 2015 | PAPER | PETITIONER |
Power of Attorney | Dec 28, 2015 | PAPER | PETITIONER |
Power of Attorney | Dec 28, 2015 | PAPER | PETITIONER |
Petition for Inter Partes Review of U.S. Patent No. 8,035,233 | Dec 28, 2015 | PAPER | PETITIONER |
US 8,035,233 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1002 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1003 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1006 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1007 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1013 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1014 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1015 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1017 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1040 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1041 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1042 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1043 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1044 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1045 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1046 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1047 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1048 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1049 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1050 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1051 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1052 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1053 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1054 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1055 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1056 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1057 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1058 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1059 | Dec 28, 2015 | EXHIBIT | PETITIONER |
1063 | Dec 28, 2015 | EXHIBIT | PETITIONER |