Termination Decision Document | Sep 11, 2017 | PAPER | BOARD |
Record of Oral Hearing | Jul 27, 2017 | PAPER | BOARD |
Patent Owner's Demonstrative Exhibits | May 8, 2017 | EXHIBIT | PATENT OWNER |
Petitioner's Demonstrative Exhibits | May 8, 2017 | EXHIBIT | PETITIONER |
Order - Conduct of the Proceeding - 37 CFR 42.5 | Apr 19, 2017 | PAPER | BOARD |
Petitioner's Response to Patent Owner's Motion for Observations on Cross-Examination Testimony | Apr 14, 2017 | PAPER | PETITIONER |
Order Granting Request for Oral Argument | Apr 11, 2017 | PAPER | BOARD |
Petitioner's Request for Oral Argument Pursuant to 37 C.F.R. ¿¿42.70 | Mar 31, 2017 | PAPER | PETITIONER |
Patent Owner's Motion for Observations on Cross-Examination Testimony | Mar 31, 2017 | PAPER | PATENT OWNER |
Exhibit 2042 - Excerpt Prosecution History App. No. 10/008,665 | Mar 31, 2017 | EXHIBIT | PATENT OWNER |
Patent Owner's Second Amended Exhibit List | Mar 31, 2017 | PAPER | PATENT OWNER |
Patent Owner's Request for Oral Argument | Mar 31, 2017 | PAPER | PATENT OWNER |
Exhibit 2043 - Demonstrative | Mar 31, 2017 | EXHIBIT | PATENT OWNER |
Exhibit 2044 - Pound 2nd Depo | Mar 31, 2017 | EXHIBIT | PATENT OWNER |
Notice of Deposition of Dr. Pound | Mar 10, 2017 | PAPER | PATENT OWNER |
Patent Owner's Objections to Evidence | Mar 7, 2017 | PAPER | PATENT OWNER |
Reply in Support of Petition | Feb 28, 2017 | PAPER | PETITIONER |
Exhibit 1025 | Feb 28, 2017 | EXHIBIT | PETITIONER |
Exhibit 1026 | Feb 28, 2017 | EXHIBIT | PETITIONER |
Exhibit 1028 | Feb 28, 2017 | EXHIBIT | PETITIONER |
Exhibit 1029 | Feb 28, 2017 | EXHIBIT | PETITIONER |
Exhibit 1030 | Feb 28, 2017 | EXHIBIT | PETITIONER |
Exhibit 1031 | Feb 28, 2017 | EXHIBIT | PETITIONER |
Exhibit 1033 | Feb 28, 2017 | EXHIBIT | PETITIONER |
Exhibit 1027 | Feb 28, 2017 | EXHIBIT | PETITIONER |
Exhibit 1032 | Feb 28, 2017 | EXHIBIT | PETITIONER |
Exhibit 1034 | Feb 28, 2017 | EXHIBIT | PETITIONER |
Notice of Deposition of Dr. Dale P. Barkey | Jan 17, 2017 | PAPER | PETITIONER |
Patent Owner's Response | Dec 16, 2016 | PAPER | PATENT OWNER |
Exhibit 2033 - Healy Article | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2030 - Pound CV | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2031 - Declaration of Dr. Barkey | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2032 - Barkey | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2035 - Huang | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Patent Owner's Amended Exhibit List | Dec 16, 2016 | PAPER | PATENT OWNER |
Exhibit 2034 - Mendez | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2036 - Broekmann | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2037 - Galloway et al | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2038 - Pound Depo | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2039 - Eliadis | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2040 - DECISION AND ORDER ADOPTING IN PART OPENING CLAIM CONSTRUCTION BRIEFS | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Exhibit 2041 - Report and Recommendations | Dec 16, 2016 | EXHIBIT | PATENT OWNER |
Petitioner's Updated Mandatory Notices | Nov 11, 2016 | PAPER | PETITIONER |
Order - 37 C.F.R. 42.5 | Oct 20, 2016 | PAPER | BOARD |
Notice of Stipulation Regarding Due Dates 1 and 2 | Oct 7, 2016 | PAPER | PATENT OWNER |
Patent Owner's Notice of Deposition of Dr. Bruce Pound | Oct 7, 2016 | PAPER | PATENT OWNER |
Motion For Withdrawal Of Joseph D. Eng, Jr. As Back-Up Counsel | Sep 19, 2016 | PAPER | PETITIONER |
Scheduling Order | Sep 14, 2016 | PAPER | BOARD |
Decision - Institution of Inter Partes Review | Sep 12, 2016 | PAPER | BOARD |
PATENT OWNERS PRELIMINARY RESPONSE | Jun 13, 2016 | PAPER | PATENT OWNER |
Exhibit List | Jun 13, 2016 | PAPER | PATENT OWNER |
Decision Denying Institution of Inter Partes Review in IPR2014-00246 | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
US 2002/00112964 A1 | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
August 12, 2014 Non-Confidential Declaration of Dr. Dale Barkey | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
October 13, 2014 Second Declaration of Dale Barkey | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Curriculum vitae of Dr. Dale Barkey | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Landau, et al., Simulations of Bottom-Up Fill in Via Plating of Semiconductor Interconnects | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
U.S. Patent No. 6,399,479 | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Moffat et al., Superconformal film growth Mechanism and quantification | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
US 2005/0095854 A1 | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Mofatt et al., Electrodeposition of Copper in the SPS-PEG-Cl Additive System | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Akolkar and Landau, A Time-Dependent Transport-Kinetics Model for Additive Interactions in Copper Interconnect Metallization | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
West et al., A Superfilling Model that Predicts Bump Formation | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Herbert et al., Chemical Mechanism of Suppression of Copper Electrodeposition by Poly(ethylene glycol) | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Cao et al., Three-Additive Model of Superfilling of Copper | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Taephaisitphongse et al., Electrochemical and Fill Studies of a Multicomponent Additive Package for Copper Deposition | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Wiley and West, SPS Adsorption and Desorption during Copper Electrodeposition and Its Impact on PEG Adsorption | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Gallaway and West, PEG, PPG, and Their Triblock Copolymers as Suppressors in Copper Electroplating | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
U.S. Patent No. 6,649,038 (Mikkola I) | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
U.S. 2004/0217009 A1 (Mikkola II) | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
U.S. Patent No. 6,645,364 | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Joint Claim Construction and Prehearing Statement | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Hasegawa et al., Effects of Additives on Copper Electrodeposition in Submicrometer Trenches | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Excerpts from Handbook of Detergents | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Excerpts from Rosen, Surfactants and Interfacial Phenomena | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Schramm et al., Surfactants and their applications | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Garcia-Cordona et al., NMR Spectral Studies of Interactions Between the Accelerants SPS and MPS and Copper Chlorides | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Hai et al., Beyond Interfacial Anion/Cation Pairing | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
December 10, 2013 Petition for Inter Partes Review | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
December 10, 2013 Declaration of Alan C. West | Jun 13, 2016 | EXHIBIT | PATENT OWNER |
Notice of Accepting Corrected Petition | Mar 18, 2016 | PAPER | BOARD |
Mandatory Notices of the Patent Owner | Mar 18, 2016 | PAPER | PATENT OWNER |
CORRECTED PETITION FOR INTER PARTES REVIEW OF CLAIMS 1-6, 8, AND 11-18 OF U.S. PATENT NO. 7,815,786 | Mar 17, 2016 | PAPER | PETITIONER |
Power of Attorney | Mar 17, 2016 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Notice of Filing Date Accorded to Petition/Defective Petition | Mar 11, 2016 | PAPER | BOARD |
Petiton_For_Inter_Partes_Review_Of_US 7815786 | Feb 29, 2016 | PAPER | PETITIONER |
Power of Attorney | Feb 29, 2016 | PAPER | PETITIONER |
Exhibit1001 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1002 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1003 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1004 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1005 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1006 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1007 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1008 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1009 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1010 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1011 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1012 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1013 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1014 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1015 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1016 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1017 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1018 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1019 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1020 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1021 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1022 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1023 | Feb 29, 2016 | EXHIBIT | PETITIONER |
Exhibit1024 | Feb 29, 2016 | EXHIBIT | PETITIONER |