Petitioner's Notice of Appeal | Oct 18, 2017 | PAPER | PETITIONER |
Final Written Decision | Aug 22, 2017 | PAPER | BOARD |
Record of Oral Hearing | May 12, 2017 | PAPER | BOARD |
Revised Trial Order | Mar 15, 2017 | PAPER | BOARD |
Order - Trial Hearing | Mar 7, 2017 | PAPER | BOARD |
Exhibit 1080 - U.S. Patent No. 6,204,174 to Glew, et al., issued March
20, 2001 | Mar 2, 2017 | EXHIBIT | PETITIONER |
Exhibit 1086 - U.S. Patent No. 8,907,499 to Leedy, issued December 9, 2014 | Mar 2, 2017 | EXHIBIT | PETITIONER |
Exhibit 1087 - U.S. Patent No. 4,717,448 to Cox, issued January 5, 1988 | Mar 2, 2017 | EXHIBIT | PETITIONER |
Exhibit 1081 - Alexander David Glew, Plasma Deposition of Diamond-Like Carbon and Fluorinated Amorphouse Carbon and the Resultant Properties and Structure (Dec. 2002), UMI No. 3085291 | Mar 2, 2017 | EXHIBIT | PETITIONER |
Exhibit 1082 - Deposition Transcript of Alexander D. Glew, Ph.D. (January 20, 2017) | Mar 2, 2017 | EXHIBIT | PETITIONER |
Exhibit 1083 - Chanana, et al., Effect of Annealing and Plasma Precleaning on the Electrical Properties of N2/SiH4 PECVD Oxide as Gate Material in Mosfets and CCDs, Solid State Electronics, 36(7):1021-1026 (1993) | Mar 2, 2017 | EXHIBIT | PETITIONER |
Exhibit 1084 - Wang et al., Characteristics of CMOS Devices Fabricated Using High Quality Thin PECVD Gate Oxide, IEDM ¿¿¿89:463-466 (Dec. 1989) | Mar 2, 2017 | EXHIBIT | PETITIONER |
Exhibit 1085 - Milton Ohring, The Materials Science of Thin Films, pp. 355-402 (Academic Press 1992) | Mar 2, 2017 | EXHIBIT | PETITIONER |
Exhibit 1088 - Schubert, P.J., and Neudeck, G.W., Confined Lateral Selective Epitaxial Growth of Silicon for Device Fabrication, IEEE Electronic Devices Letters 11(5):181-183 (May 1990) | Mar 2, 2017 | EXHIBIT | PETITIONER |
Exhibit 1089 - U.S. Patent No. 7,485,571 to Leedy, issued February 3,
2009 | Mar 2, 2017 | EXHIBIT | PETITIONER |
Exhibit 1090 - Guldi, R.L., Source/Drain Dislocations and Electrical Leakage in Titanium-Salicided CMOS Integrated Circuits¿¿¿ J. Electrochem. Soc. 141(7):1957-1963 (July 1994) | Mar 2, 2017 | EXHIBIT | PETITIONER |
Petitioner's Reply to Patent Owner's Response | Mar 2, 2017 | PAPER | PETITIONER |
Petitioner's Objections to Patent Owner's Evidence | Jan 11, 2017 | PAPER | PETITIONER |
PETER VAN ZANT, MICROCHIP FABRICATION (4th ed., 2000) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
Patent Owner's Response | Jan 4, 2017 | PAPER | PATENT OWNER |
(Part 1) - W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
(Part 2) - W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
SILICON NITRIDE AND SILICON DIOXIDE THIN INSULATING FILMS (M.J. Dean, et al. eds., 1997) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
(Part 1) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
Transcript of Deposition of Paul D. Franzon, Ph.D. ¿¿¿ October 6, 2016 | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
Flexible and Substantial excerpts from the Oxford American Dictionary of Current English (1999) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
Declaration of Alexander D. Glew, PH.D. | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
Prosecution History of U.S. Application 12/497,652 ¿¿¿ Response to Office Action dated July 17, 2012 | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
Prosecution History of U.S. Application 12/497,652 ¿¿¿ Office Action mailed on May 20, 2014 | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
HANDBOOK SEMICONDUCTOR MANUFACTURING TECHNOLOGY (Robert Doering & Yoshio Nishi eds., 2nd ed. 2008) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
(Part 2) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
(Part 3) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
(Part 4) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
(Part 5) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
Silicon dioxide - Wikipedia | Jan 4, 2017 | EXHIBIT | PATENT OWNER |
Patent Owner's Updated Exhibit List | Jan 4, 2017 | PAPER | PATENT OWNER |
Notice of Deposition of Dr. Alexander D. Glew | Dec 19, 2016 | PAPER | PETITIONER |
PO Motion for Pro Hac Vice Admission of Michael C. Newman 37 C.F.R. 42.10 | Nov 9, 2016 | PAPER | BOARD |
Patent Owner's Updated Mandatory Notices | Nov 9, 2016 | PAPER | PATENT OWNER |
Patent Owner's Unopposed Motion for Pro Hac Vice Admission of M. Newman | Nov 2, 2016 | PAPER | PATENT OWNER |
Declaration of Michael Newman in Support of Pro Hac Vice Admission | Nov 2, 2016 | EXHIBIT | PATENT OWNER |
Patent Owner's Updated Exhibit List | Nov 2, 2016 | PAPER | PATENT OWNER |
Patent Owner's Updated Mandatory Notices | Oct 25, 2016 | PAPER | PATENT OWNER |
Petitioner's Updated Mandatory Notices | Oct 25, 2016 | PAPER | PETITIONER |
Ex. 1079 | Oct 25, 2016 | EXHIBIT | PETITIONER |
Petitioner's Updated Exhibit List | Oct 25, 2016 | PAPER | PETITIONER |
Decision - Patent Owner's Motion for Withdrawal and Substitution of Cousnel | Oct 17, 2016 | PAPER | BOARD |
Patent Owner's Objections to Evidence | Oct 13, 2016 | PAPER | PATENT OWNER |
Petitioner's Objections to Patent Owner's Evidence | Oct 13, 2016 | PAPER | PETITIONER |
Patent Owners Motion for Withdrawal and Substitution of Counsel | Oct 11, 2016 | PAPER | PATENT OWNER |
Patent Owners Supplemental Mandatory Notices | Oct 11, 2016 | PAPER | PATENT OWNER |
Patent Owners Power of Attorney | Oct 6, 2016 | PAPER | PATENT OWNER |
Order - Petitioner's Motion for Pro Hac Vice Admission of Mr. Harold Davis | Oct 4, 2016 | PAPER | BOARD |
Order - Petitioner's Pro Hac Vice Motion for Mr. Andrew B. Grossman | Oct 4, 2016 | PAPER | BOARD |
Power of Attorney for Petitioner SK Hynix Inc. | Sep 30, 2016 | PAPER | PETITIONER |
Power of Attorney for Petitioner Micron Technology, Inc. | Sep 30, 2016 | PAPER | PETITIONER |
Power of Attorney for Petitioner Samsung Electronics Co., Ltd. | Sep 30, 2016 | PAPER | PETITIONER |
Petitioner's Motion for Admission Pro Hac Vice of Andrew B. Grossman | Sep 30, 2016 | PAPER | PETITIONER |
Petitioner's Motion for Admission Pro Hac Vice of Harold H. Davis, Jr. | Sep 30, 2016 | PAPER | PETITIONER |
Ex. 1077 | Sep 30, 2016 | EXHIBIT | PETITIONER |
Ex. 1078 | Sep 30, 2016 | EXHIBIT | PETITIONER |
Petitioner's Updated Exhibit List | Sep 30, 2016 | PAPER | PETITIONER |
Scheduling Order | Sep 28, 2016 | PAPER | BOARD |
Trial Instituted Document | Sep 28, 2016 | PAPER | BOARD |
Petitioner's Updated Mandatory Notices | Jul 8, 2016 | PAPER | PETITIONER |
Order - Patent Owners Motion for Pro Hac Vice Admission of Samuel L. Walling | Jul 1, 2016 | PAPER | BOARD |
Patent Owner Preliminary Response | Jun 30, 2016 | PAPER | PATENT OWNER |
Ex. 2133 | Jun 30, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2135 | Jun 30, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2136 | Jun 30, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2137 | Jun 30, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2146 | Jun 30, 2016 | EXHIBIT | PATENT OWNER |
Ex. 2147 | Jun 30, 2016 | EXHIBIT | PATENT OWNER |
Notice of Accepting Corrected Petition | May 20, 2016 | PAPER | BOARD |
Elm 3DS Innovations LLC's Motion for Pro Hac Vice Admission of Samuel L. Walling and Declaration of Samuel L. Walling in Support of Motion | May 6, 2016 | PAPER | PATENT OWNER |
Power of Attorney | May 5, 2016 | PAPER | PATENT OWNER |
Petitioner's Response to Notice of Filing Date | Mar 31, 2016 | PAPER | PETITIONER |
Petitioner's Corrected Exhibit List | Mar 31, 2016 | PAPER | PETITIONER |
Notice of Filing Date Accorded to Petition-Defective Petition | Mar 30, 2016 | PAPER | BOARD |
Power of Attorney | Mar 25, 2016 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Related Matters | Mar 25, 2016 | PAPER | INDICATES ARTIFACT WAS SUBMITTED ON BEHALF OF POTENTIAL_PATENT OWNER. |
Power of Attorney | Mar 17, 2016 | PAPER | PETITIONER |
Power of Attorney | Mar 17, 2016 | PAPER | PETITIONER |
Power of Attorney | Mar 17, 2016 | PAPER | PETITIONER |
Petition | Mar 17, 2016 | PAPER | PETITIONER |
Ex. 1001 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1002 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1003 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1004 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1005 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1006 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1007 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1008 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1011 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1016 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1018 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1019 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1020 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1021 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1022 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1023 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1024 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1025 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1026 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1028 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1029 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1030 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1031 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1032 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1033 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1034 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1035 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1036 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1039 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1040 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1041 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1042 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1043 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1044 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1045 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1046 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1047 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1048 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1049 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1050 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1051 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1052 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1053 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1054 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1055 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1056 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1057 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1058 | Mar 17, 2016 | EXHIBIT | PETITIONER |
Ex. 1059 | Mar 17, 2016 | EXHIBIT | PETITIONER |