Trial Instituted Document | Dec 8, 2017 | PAPER | BOARD |
PO Preliminary Response | Sep 19, 2017 | PAPER | PATENT OWNER |
Ex. 2101 | Sep 19, 2017 | EXHIBIT | PATENT OWNER |
Ex. 2102 | Sep 19, 2017 | EXHIBIT | PATENT OWNER |
Ex. 2104 | Sep 19, 2017 | EXHIBIT | PATENT OWNER |
Ex. 2108 | Sep 19, 2017 | EXHIBIT | PATENT OWNER |
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Ex. 2114 | Sep 19, 2017 | EXHIBIT | PATENT OWNER |
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Ex. 2117 | Sep 19, 2017 | EXHIBIT | PATENT OWNER |
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Ex. 2105 | Sep 19, 2017 | EXHIBIT | PATENT OWNER |
Ex. 2106 | Sep 19, 2017 | EXHIBIT | PATENT OWNER |
Ex. 2107 | Sep 19, 2017 | EXHIBIT | PATENT OWNER |
Ex. 2116 | Sep 19, 2017 | EXHIBIT | PATENT OWNER |
Declaration of Jared Bobrow In Support of Petitioner's Motion for Admission Pro Hac Vice | Jul 11, 2017 | EXHIBIT | PETITIONER |
Petitioner's Motion for Admission Pro Hac Vice of Jared Bobrow | Jul 11, 2017 | PAPER | PETITIONER |
EXPUNGED | Jun 19, 2017 | PAPER | BOARD |
Notice of Filing Date Accorded to Petition | Jun 19, 2017 | PAPER | BOARD |
IPR2017-01493 PO Mandatory Notice | Jun 16, 2017 | PAPER | PATENT OWNER |
IPR2017-01493 PO Power of Attorney | Jun 16, 2017 | PAPER | PATENT OWNER |
Petitioner's Updated Mandatory Notices | Jun 5, 2017 | PAPER | PETITIONER |
U.S. Patent No. 6,159,855 | May 26, 2017 | EXHIBIT | PETITIONER |
Leskela, M. and M. Ritala, ALD precursor chemistry: Evolution and future challenges | May 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,723,577 | May 26, 2017 | EXHIBIT | PETITIONER |
Petition | May 26, 2017 | PAPER | PETITIONER |
Power of attorney | May 26, 2017 | PAPER | PETITIONER |
U.S. Patent No. 6,969,539 | May 26, 2017 | EXHIBIT | PETITIONER |
Excerpts from Prosecution File History for U.S. Patent No. 6,969,539 | May 26, 2017 | EXHIBIT | PETITIONER |
Declaration of Dr. Sanjay Banerjee | May 26, 2017 | EXHIBIT | PETITIONER |
Curriculum Vitae of Dr. Sanjay Banerjee | May 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,984,591 | May 26, 2017 | EXHIBIT | PETITIONER |
Dusco, C., et al., Deposition of Tin Oxide into Porous Silicon by Atomic Layer Epitaxy | May 26, 2017 | EXHIBIT | PETITIONER |
Ott, A.W., et al., Modification of Porous Alumina Membranes Using Al2O3 Atomic Layer Controlled Deposition | May 26, 2017 | EXHIBIT | PETITIONER |
Leskela, M. and M. Ritala, Atomic Layer Epitaxy in Deposition of Various Oxide and Nitride Thin Films | May 26, 2017 | EXHIBIT | PETITIONER |
Ruff, J., The Preparation and Reactions of Dialkylamino Derivatives of Aluminum | May 26, 2017 | EXHIBIT | PETITIONER |
Jones, K. and Lappert, M.F., Amino-derivatives of Metals and Metalloids | May 26, 2017 | EXHIBIT | PETITIONER |
Bastianini, A., et al., Chemical Vapor Deposition | May 26, 2017 | EXHIBIT | PETITIONER |
Viirola, H. and Niinisto, L., Controlled growth of tin dioxide thin films by atomic layer epitaxy | May 26, 2017 | EXHIBIT | PETITIONER |
Min, J., et al., Atomic Layer Deposition of TiN Films | May 26, 2017 | EXHIBIT | PETITIONER |
Bouman, M. and Zaera, F., Reductive Eliminations from Amido Metal Complexes | May 26, 2017 | EXHIBIT | PETITIONER |
Harvard Complaint | May 26, 2017 | EXHIBIT | PETITIONER |
Certified Translation of Korean Patent No. 0156980 | May 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 5,178,911 | May 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No.6,045,650 | May 26, 2017 | EXHIBIT | PETITIONER |
Declaration of Roy G. Gordon | May 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 7,507,848 | May 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 8,334,016 | May 26, 2017 | EXHIBIT | PETITIONER |
Roy Gordon LinkedIn Profile | May 26, 2017 | EXHIBIT | PETITIONER |
Markku Leskela LinkedIn Profile | May 26, 2017 | EXHIBIT | PETITIONER |
Douglas Buchanan LinkedIn Profile | May 26, 2017 | EXHIBIT | PETITIONER |
Brian Vaartstra LinkedIn Profile | May 26, 2017 | EXHIBIT | PETITIONER |
Gates, S.M., Surface Chemistry in the Chemical Vapor | May 26, 2017 | EXHIBIT | PETITIONER |
Excerpts from Prosecution File History of U.S. Patent No. 8,334,016 | May 26, 2017 | EXHIBIT | PETITIONER |
George, S.M. et al., Surface Chemistry for Atomic Layer Growth | May 26, 2017 | EXHIBIT | PETITIONER |
Pierson, H., Principles, Technology, and Applications | May 26, 2017 | EXHIBIT | PETITIONER |
Fix, R., et al., Chemical Vapor Deposition of Titanium | May 26, 2017 | EXHIBIT | PETITIONER |
Smith, R., Chemical Vapour Deposition of the Oxides of Titanium | May 26, 2017 | EXHIBIT | PETITIONER |
Brusasco, Raymond M., High Index of Refraction Films | May 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 5,252,518 | May 26, 2017 | EXHIBIT | PETITIONER |
Ritala, M. et al., Atomic Layer Deposition of Oxide Thin Films | May 26, 2017 | EXHIBIT | PETITIONER |
Ritala, M., Advanced ALE processes of amorphous | May 26, 2017 | EXHIBIT | PETITIONER |
Niinisto, L. et al., Synthesis of oxide thin films and overlayers | May 26, 2017 | EXHIBIT | PETITIONER |
Declarations of Susanne J Redalje | May 26, 2017 | EXHIBIT | PETITIONER |
Hampden-Smith, M.J. and Kodas, T.T., Chemical Vapor Deposition of Metals | May 26, 2017 | EXHIBIT | PETITIONER |
Suntola, T., Atomic Layer Epitaxy | May 26, 2017 | EXHIBIT | PETITIONER |
Bradley, D.C. and Thomas, I.M., Metallo-organic compounds | May 26, 2017 | EXHIBIT | PETITIONER |
Suntola, T. and J. Hyvarinen, Atomic Layer Epitaxy | May 26, 2017 | EXHIBIT | PETITIONER |
Ritala, M. et al., Perfectly Conformal TiN and Al2O3 Films | May 26, 2017 | EXHIBIT | PETITIONER |
Solid State Technology, Insights for Electronics Manufacturing | May 26, 2017 | EXHIBIT | PETITIONER |
Goodman, C. and Pessa, M.V., Atomic layer epitaxy | May 26, 2017 | EXHIBIT | PETITIONER |
George, S. M., Atomic Layer Deposition | May 26, 2017 | EXHIBIT | PETITIONER |
Ritala, M. and M. Leskela, Zirconium dioxide thin films deposited | May 26, 2017 | EXHIBIT | PETITIONER |
Colombo, D. et al., Anhydrous Metal Nitrates as Volatile Single | May 26, 2017 | EXHIBIT | PETITIONER |
Bradley, D.C. and Gitlitz, M.H., Metallo-organic Compounds | May 26, 2017 | EXHIBIT | PETITIONER |
Lee, J.G. et al., Comparison of TiN films produced by TDEAT | May 26, 2017 | EXHIBIT | PETITIONER |
ITRS Roadmap | May 26, 2017 | EXHIBIT | PETITIONER |
Kytokivi, A. et al., Controlled Formation of ZrO2 in the Reaction | May 26, 2017 | EXHIBIT | PETITIONER |
Declaration of Sharon Wiles-Young | May 26, 2017 | EXHIBIT | PETITIONER |
Declaration of Sharon-Wiles-Young | May 26, 2017 | EXHIBIT | PETITIONER |
T. W. Ryan et al., Ignition Delays, Heats Of Combustion | May 26, 2017 | EXHIBIT | PETITIONER |
Declarations of Susanne J Redalje | May 26, 2017 | EXHIBIT | PETITIONER |
Declaration of Sharon Wiles-Young | May 26, 2017 | EXHIBIT | PETITIONER |
Declaration of Sharon Wiles-Young | May 26, 2017 | EXHIBIT | PETITIONER |
European Patent Publication No. EP 0322155 | May 26, 2017 | EXHIBIT | PETITIONER |
Lide, D.R. et al., CRC Handbook of Chemistry and Physics | May 26, 2017 | EXHIBIT | PETITIONER |
Roesky H.W., Preparation and Reactions of Sulfur-Nitrogen Ring | May 26, 2017 | EXHIBIT | PETITIONER |