Decision - Denying Petitioner's Request for Rehearing of Final Written Decision | Mar 11, 2019 | PAPER | BOARD |
Petitioner Request For Rehearing | Feb 4, 2019 | PAPER | PETITIONER |
Termination Decision Document | Jan 3, 2019 | PAPER | BOARD |
Hearing Transcript | Oct 25, 2018 | PAPER | BOARD |
Petitioners Substitute Demonstrative Exhibits | Oct 5, 2018 | EXHIBIT | PETITIONER |
Email Authorization to file Sub Demonstratives | Oct 5, 2018 | EXHIBIT | PETITIONER |
Certificate of Service | Oct 5, 2018 | EXHIBIT | PETITIONER |
Patent Owner's Demonstrative Exhibit | Oct 3, 2018 | EXHIBIT | PATENT OWNER |
Petitioners Demonstrative Exhibits | Oct 3, 2018 | PAPER | PETITIONER |
Petitioners Demonstrative Exhibites | Oct 3, 2018 | EXHIBIT | PETITIONER |
ORDER Oral Argument | Sep 5, 2018 | PAPER | BOARD |
Petitioner's Request For Oral Argument | Sep 4, 2018 | PAPER | PETITIONER |
Email Authorization to File Sur-Reply | Sep 4, 2018 | EXHIBIT | PATENT OWNER |
Patent Owner's Sur-Reply | Sep 4, 2018 | PAPER | PATENT OWNER |
Patent Owner's Request for Oral Argument | Sep 4, 2018 | PAPER | PATENT OWNER |
Patent Owner's Reply to Petitioner's Opposition to Contingent Motion to Amend | Aug 13, 2018 | PAPER | PATENT OWNER |
Petitioner Reply to Patent Owner Response | Jul 12, 2018 | PAPER | PETITIONER |
Shanfield Deposition Transcript | Jul 12, 2018 | EXHIBIT | PETITIONER |
Shanfield Deposition ErattaSheet | Jul 12, 2018 | EXHIBIT | PETITIONER |
U.S. Patent Pub. 20070175856 (Johnson) | Jul 12, 2018 | EXHIBIT | PETITIONER |
US Patent Pub. 20040235307 (Johnson) | Jul 12, 2018 | EXHIBIT | PETITIONER |
Petitioner Opposition to Motion To Amend | Jul 12, 2018 | PAPER | PETITIONER |
Petitioner's Notice of Deposition of Dr. Shanfield | Apr 25, 2018 | PAPER | PETITIONER |
Patent Owner's Response | Apr 12, 2018 | PAPER | PATENT OWNER |
Supplemental Declaration of Stanley Shanfield, Ph.D. | Apr 12, 2018 | EXHIBIT | PATENT OWNER |
Transcript of Deposition of Dr. John E. Spencer | Apr 12, 2018 | EXHIBIT | PATENT OWNER |
"The Bosch Process for Etching Micro-Mechanical Systems (MEMS)" | Apr 12, 2018 | EXHIBIT | PATENT OWNER |
U.S. Patent No. 6,456,158 (Sekiya) | Apr 12, 2018 | EXHIBIT | PATENT OWNER |
Eisenhammer et al., "Achieving High Aspect Ratio TSVs" | Apr 12, 2018 | EXHIBIT | PATENT OWNER |
Huang, et al., "The Optimal DRIE Parameter for Bulk Micro-Machining Process" | Apr 12, 2018 | EXHIBIT | PATENT OWNER |
Donnelly, et al., "Plasma etching: Yesterday, today, and tomorrow" | Apr 12, 2018 | EXHIBIT | PATENT OWNER |
Sharifi, et al., "Plasma RIE Etching Fundamentals and Applications" | Apr 12, 2018 | EXHIBIT | PATENT OWNER |
U.S. Provisional Patent Application No. 61/452,450 | Apr 12, 2018 | EXHIBIT | PATENT OWNER |
Contingent Motion to Amend | Apr 12, 2018 | PAPER | PATENT OWNER |
Conduct of the Proceeding
37 C.F.R. sec 42.5 | Apr 2, 2018 | PAPER | BOARD |
Granting Joint Motion to Expunge | Mar 12, 2018 | PAPER | BOARD |
Joint Motion to Expunge Petitioner's Supplemental Evidence | Mar 7, 2018 | PAPER | PATENT OWNER |
Patent Owner's Notice of Deposition of Dr. John E. Spencer | Feb 12, 2018 | PAPER | PATENT OWNER |
EXPUNGED | Feb 9, 2018 | PAPER | PETITIONER |
EXPUNGED | Feb 9, 2018 | EXHIBIT | PETITIONER |
Patent Owner's Objections To Evidence | Jan 26, 2018 | PAPER | PATENT OWNER |
Scheduling Order | Jan 11, 2018 | PAPER | BOARD |
Decision Institution of Inter Partes Review | Jan 11, 2018 | PAPER | BOARD |
Curriculum Vitae of Stanley Shanfield, Ph.D. | Oct 18, 2017 | EXHIBIT | PATENT OWNER |
Lei Article | Oct 18, 2017 | EXHIBIT | PATENT OWNER |
US 2009/0250738 (Dyer) | Oct 18, 2017 | EXHIBIT | PATENT OWNER |
Guide to SEMI Specs | Oct 18, 2017 | EXHIBIT | PATENT OWNER |
Patent Owner's Preliminary Response | Oct 18, 2017 | PAPER | PATENT OWNER |
Declaration of Stanley Shanfield, Ph.D. | Oct 18, 2017 | EXHIBIT | PATENT OWNER |
SOI Materials Chapter by Colinge | Oct 18, 2017 | EXHIBIT | PATENT OWNER |
SOI Tech. & Devices XI | Oct 18, 2017 | EXHIBIT | PATENT OWNER |
Sensors and Actuators A | Oct 18, 2017 | EXHIBIT | PATENT OWNER |
Notice of Accord Filing Date | Jul 18, 2017 | PAPER | BOARD |
Patent Owner's Power of Attorney | Jul 10, 2017 | PAPER | PATENT OWNER |
Patent Owner's Mandatory Notices | Jul 10, 2017 | PAPER | PATENT OWNER |
Petition For IPR | Jun 24, 2017 | PAPER | PETITIONER |
Power of Attorney | Jun 24, 2017 | PAPER | PETITIONER |
USP 8,802,545 (the '545 patent) | Jun 24, 2017 | EXHIBIT | PETITIONER |
The '545 patent family | Jun 24, 2017 | EXHIBIT | PETITIONER |
Demand Letter | Jun 24, 2017 | EXHIBIT | PETITIONER |
US Provisional 61/452,450 | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 6,406,979 (Fisher) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 6,071,822 (Donohue) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 6,051,503 (Bhardwaj) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 6,642,127 (Kumar) | Jun 24, 2017 | EXHIBIT | PETITIONER |
Declaration of Dr. John Spencer | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 2004/0102025 (Arita) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 7,150,796 (Smith) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 9,202,720 (challenged in IPR2017-01457) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 6465158 (Sekiya) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 7,166,536 (Laermer) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 2010/0120230 (Grinva 230) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 2005/0029221 (Chang) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 8,980,764 (challenged in IPR2017-01314) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 7,507,638 (Mancini) | Jun 24, 2017 | EXHIBIT | PETITIONER |
USP 7,781,310 (Grinva 310) | Jun 24, 2017 | EXHIBIT | PETITIONER |
File History of the '545 patent | Jun 24, 2017 | EXHIBIT | PETITIONER |