Termination Decision Document | Jan 24, 2019 | PAPER | BOARD |
Joint Motion to Terminate | Jan 22, 2019 | PAPER | PATENT OWNER |
Joint Request to Keep Settlement Agreement Confidential | Jan 22, 2019 | PAPER | PATENT OWNER |
Settlement Agreement (CONFIDENTIAL) | Jan 22, 2019 | EXHIBIT | PATENT OWNER |
Patent Owner's Updated Exhibit List | Jan 22, 2019 | PAPER | PATENT OWNER |
Order Granting Patent Owner's Motions to Withdraw Counsel | Jan 10, 2019 | PAPER | BOARD |
Patent Owner's Updated Mandatory Notices | Dec 18, 2018 | PAPER | PATENT OWNER |
Motion to Withdraw Counsel | Dec 18, 2018 | PAPER | PATENT OWNER |
Hearing Transcript | Oct 17, 2018 | PAPER | BOARD |
Patent Owner's Sur-Reply Pursuant to Paper No. 40 | Oct 5, 2018 | PAPER | PATENT OWNER |
Order Conduct of the Proceeding | Oct 2, 2018 | PAPER | BOARD |
Transcript of September 26, 2018 Conference Call | Sep 27, 2018 | EXHIBIT | PATENT OWNER |
Patent Owner's Notice of Filing Transcript of September 26, 2018 Conference Call | Sep 27, 2018 | PAPER | PATENT OWNER |
Order Authorizing Patent Owner Sur-Reply | Sep 14, 2018 | PAPER | BOARD |
Patent Owner's Notice of Filing Demonstrative Exhibits | Sep 5, 2018 | PAPER | PATENT OWNER |
Patent Owner's Demonstrative Exhibits | Sep 5, 2018 | EXHIBIT | PATENT OWNER |
Petitioner's Demonstratives for Oral Argument | Sep 5, 2018 | PAPER | PETITIONER |
Patent Owner's Reply in Support of it's Motion to Exclude Evidence | Aug 29, 2018 | PAPER | PATENT OWNER |
Conduct of the Proceedings
37 C.F.R. sec. 42.5 | Aug 27, 2018 | PAPER | BOARD |
Petitioner's Opposition to Patent Owner's Motion to Exclude | Aug 22, 2018 | PAPER | PETITIONER |
Petitioner's Response to Patent Owner's Observations on Cross-Examination | Aug 22, 2018 | PAPER | PETITIONER |
Patent Owner's Motion for Observations on Cross Examination | Aug 9, 2018 | PAPER | PATENT OWNER |
Patent Owner's Motion to Exclude Evidence | Aug 9, 2018 | PAPER | PATENT OWNER |
Patent Owner's Request for Oral Argument | Aug 9, 2018 | PAPER | PATENT OWNER |
Patent Owner's Updated Exhibit List | Aug 9, 2018 | PAPER | PATENT OWNER |
Shanfield Deposition Exhibit | Aug 9, 2018 | EXHIBIT | PATENT OWNER |
Transcript of Deposition of Stanley R. Shanfield | Aug 9, 2018 | EXHIBIT | PATENT OWNER |
Petitioner's Request for Oral Argument | Aug 8, 2018 | PAPER | PETITIONER |
Petitioner's Response Pursuant to July 20, 2018 Order | Jul 27, 2018 | PAPER | PETITIONER |
Patent Owner's Identification Improper New Arguments in Petitioner's Reply | Jul 24, 2018 | PAPER | PATENT OWNER |
Patent Owner's Notice of Filing Transcript of July 19, 2018 Conference Call | Jul 20, 2018 | PAPER | PATENT OWNER |
Transcript of July 19, 2018 Conference Call | Jul 20, 2018 | EXHIBIT | PATENT OWNER |
Order - Conduct of the Proceedings | Jul 20, 2018 | PAPER | BOARD |
Notice of Deposition of Stanley R. Shanfield, Ph.D. | Jul 18, 2018 | PAPER | PATENT OWNER |
Patent Owner's Objections to Evidence Served with Reply | Jul 13, 2018 | PAPER | PATENT OWNER |
Petitioner's Reply to Patent Owner's Response | Jul 6, 2018 | PAPER | PETITIONER |
A. Allan et al., 2001 Technology Roadmap For Semiconductors | Jul 6, 2018 | EXHIBIT | PETITIONER |
Declaration of Alexander D. Glew, Ph.D. in IPR2016-00386 | Jul 6, 2018 | EXHIBIT | PETITIONER |
Deposition Transcript of Alexander D. Glew, Ph.D. | Jul 6, 2018 | EXHIBIT | PETITIONER |
Reply Declaration of Stanley R. Shanfield, Ph.D. | Jul 6, 2018 | EXHIBIT | PETITIONER |
R. W. Hoffman, Stress Distributions and Thin Film Mechanical
Properties, 1981 | Jul 6, 2018 | EXHIBIT | PETITIONER |
Petitioner's Notice of Deposition of Alexander D. Glew | Jun 1, 2018 | PAPER | PETITIONER |
Declaration of Alexander D. Glew, Ph.D., P.E. | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Exhibit 2003 from March 27-28 Deposition of Dr. Stanley Shanfield, | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Exhibit 2006 from March 27-28 Deposition of Dr. Stanley Shanfield | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
U.S. Pat. No. 5,792,695 | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Kastenmeier, et al., J. VAC. SCI. TECH. 2102 (2000) | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Schaepkens, et al., J. VAC. SCI. TECH. 26 (1999) | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
U.S. Patent No. 5,505,816 | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Transcript of the Deposition of Stanley R. Shanfield, Ph.D. (March 27, 2018) | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Transcript of the Deposition of Stanley R. Shanfield, Ph.D. (March 28, 2018) | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Exhibit 2001 from March 27-28 Deposition of Dr. Stanley Shanfield | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Exhibit 2002 from March 27-28 Deposition of Dr. Stanley Shanfield | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Exhibit 2004 from March 27-28 Deposition of Dr. Stanley Shanfield | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Exhibit 2005 from March 27-28 Deposition of Dr. Stanley Shanfield | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
U.S. Pat. No. 6,924,237 | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
U.S. Pub. No. 2004/0164359 | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
U.S. Pat. No. 4,908,324 | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
U.S. Pat. No. 6,020,233 | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Park, et al., 16 ETRI Journal 45 (1994) | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Miyatake, et al., 1593 SPIE 47 (1991) | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Butterbaugh, et al., J. VAC. SCI. TECH. 1461 (1991) | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
The American Heritage College Dictionary (Third Edition) | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Curriculum vitae of Alexander D. Glew, Ph.D., P.E. | Apr 20, 2018 | EXHIBIT | PATENT OWNER |
Patent Owner's Response | Apr 20, 2018 | PAPER | PATENT OWNER |
Patent Owner's Updated Mandatory Notices | Mar 26, 2018 | PAPER | PATENT OWNER |
Patent Owner's Updated Power of Attorney | Mar 26, 2018 | PAPER | PATENT OWNER |
ORDER Granting Patent Owner's Motions for Pro Hac Vice Admission of Joshua J. Miller | Mar 22, 2018 | PAPER | BOARD |
EXPUNGED | Mar 22, 2018 | PAPER | BOARD |
Notice of Deposition of Stanley R. Shanfield, Ph.D. | Mar 16, 2018 | PAPER | PATENT OWNER |
Declaration of Joshua J. Miller in Support of Motion for Admission Pro Hac Vice | Mar 14, 2018 | EXHIBIT | PATENT OWNER |
Motion for Pro Hac Vice Admission of Joshua J. Miller | Mar 14, 2018 | PAPER | PATENT OWNER |
Patent Owner's Objections to Evidence | Feb 20, 2018 | PAPER | PATENT OWNER |
Order - Conduct of the Proceedings; Rescheduling Oral Argument - 37 CFR 42.5 | Feb 14, 2018 | PAPER | BOARD |
Scheduling Order | Feb 6, 2018 | PAPER | BOARD |
Decision - Institution of Inter Partes Review | Feb 6, 2018 | PAPER | BOARD |
Petitioner's Updated Exhibit List | Jan 9, 2018 | PAPER | PETITIONER |
December 19, 2017 Conference Call Transcript | Jan 9, 2018 | EXHIBIT | PETITIONER |
Infringement contentions dated February 1 2017 | Jan 9, 2018 | EXHIBIT | PETITIONER |
Denying Petitioner's Request to File Reply to Preliminary Response | Dec 29, 2017 | PAPER | BOARD |
Request for Continued Examination dated March 29, 2010 | Nov 8, 2017 | EXHIBIT | PATENT OWNER |
Patent Owner's Preliminary Response | Nov 8, 2017 | PAPER | PATENT OWNER |
U.S. Patent No. 6,437,404 ("Xiang") | Nov 8, 2017 | EXHIBIT | PATENT OWNER |
U.S. Patent No. 6,870,230 ("Matsuda") | Nov 8, 2017 | EXHIBIT | PATENT OWNER |
Office Action dated March 29, 2010 | Nov 8, 2017 | EXHIBIT | PATENT OWNER |
U.S. Patent No. 3,390,022 | Nov 8, 2017 | EXHIBIT | PATENT OWNER |
McGraw-Hill Dictionary of Scientific and Technical Terms (2003) | Nov 8, 2017 | EXHIBIT | PATENT OWNER |
Patent Owner's Corrected Certificate of Word Count Under 37 C.F.R. 42.24(d) | Nov 8, 2017 | PAPER | PATENT OWNER |
Patent Owner's Mandatory Notices | Aug 11, 2017 | PAPER | PATENT OWNER |
Power of Attorney | Aug 11, 2017 | PAPER | PATENT OWNER |
Notice of Accord Filing Date | Aug 8, 2017 | PAPER | BOARD |
U.S. Patent No. 5,472,890 to Oda (Oda) | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,110,827 to Chien et al. (Chien) | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent Publication No. 2002/0145156 to Igarashi et al. (Igarashi) | Jul 26, 2017 | EXHIBIT | PETITIONER |
J. Plummer et al., Silicon VLSI Technology: Fundamentals, Practice, and Modeling, (1st ed. 2000) | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 7,893,501 | Jul 26, 2017 | EXHIBIT | PETITIONER |
Applicants Amendment and Response dated August 6, 2010 | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 5,960,270 to Misra et al. (Misra) | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,072,237 to Jang et al. (Jang) | Jul 26, 2017 | EXHIBIT | PETITIONER |
J. Rabaey et al., Digital Integrated Circuits, at 40-44 (2d ed. 2003) (Rabaey) | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,383,906 to Wieczorek et al. (Wieczorek) | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,444,566 to Tsai et al. (Tsai) | Jul 26, 2017 | EXHIBIT | PETITIONER |
K. Maex et al, Simply irresistible silicides, Physics World, at 35-39 (Nov. 1995) | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent Application No. 2003/0011043 (Roberts) | Jul 26, 2017 | EXHIBIT | PETITIONER |
Kastenmeier et al., Remote plasma etching of silicon nitride and silicon dioxide using NF3/O2 gas mixtures, J. Vac. Sci. Technol. A 16(4), Jul/Aug 1998 (Kastenmeier) | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,228,777 (Arafa) | Jul 26, 2017 | EXHIBIT | PETITIONER |
Interaction of Transition Metals with Silicon (100): The Ni-Si, Co-Si and Au/Si(100) Systems, by Steven Naftel, Graduate Program in Chemistry, The University of Western Ontario, July 1999 (Naftel) | Jul 26, 2017 | EXHIBIT | PETITIONER |
W.O. Publication No. 2002/043151 with certified English translation (Shimizu) | Jul 26, 2017 | EXHIBIT | PETITIONER |
Mizuno, T. et al., Hot-Carrier Injection Suppression Due to the Nitride-Oxide LDD Spacer Structure, IEEE Trans. Electron Dev., Vol. 38, No. 3, March, 1991 (Mizuno) | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,326,301 to Venkatesan et al. (Venkatesan) | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,509,234 | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 5,726,479 | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,512,266 | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 6,806,584 | Jul 26, 2017 | EXHIBIT | PETITIONER |
Notice of Allowance dated October 15, 2010 | Jul 26, 2017 | EXHIBIT | PETITIONER |
U.S. Patent No. 5,286,344 to Blalock et al. (Blalock) | Jul 26, 2017 | EXHIBIT | PETITIONER |
Power of Attorney | Jul 26, 2017 | PAPER | PETITIONER |
Exhibit 1202 Shanfield Declaration | Jul 26, 2017 | EXHIBIT | PETITIONER |
Petition for Inter Partes Review | Jul 26, 2017 | PAPER | PETITIONER |