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Coating Apparatus And Method For Reactive Vapor Phase Deposition On A Substrate Under Vacuum - EP3610050

The patent EP3610050 was granted to Creaphys on Jan 22, 2025. The application was originally filed on Apr 10, 2018 under application number EP18717332A. The patent is currently recorded with a legal status of "Patent Maintained As Amended".

EP3610050

CREAPHYS
Application Number
EP18717332A
Filing Date
Apr 10, 2018
Status
Patent Maintained As Amended
Dec 20, 2024
Grant Date
Jan 22, 2025
External Links
Slate, Register, Google Patents

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EUROPEAN OPPOSITIONSJun 1, 2022ERCOLANIADMISSIBLE

Patent Citations (14) New

Patent citations refer to prior patents cited during different phases such as opposition or international search.

Citation PhasePublication NumberPublication Link
INTERNATIONAL-SEARCH-REPORTDE4225352
INTERNATIONAL-SEARCH-REPORTUS2012285381
INTERNATIONAL-SEARCH-REPORTWO2006111180
INTERNATIONAL-SEARCH-REPORTWO2016021112
OPPOSITIONDE4225352
OPPOSITIONEP0286181
OPPOSITIONJP2004035325
OPPOSITIONJP2009149919
OPPOSITIONUS2004020219
OPPOSITIONUS2012285381
OPPOSITIONUS5091335
OPPOSITIONWO2006111180
OPPOSITIONWO2008039410
OPPOSITIONWO2016021112

Non-Patent Literature (NPL) Citations (11) New

NPL citations refer to non-patent references such as research papers, articles, or other publications cited during examination or opposition phases.

Citation PhaseReference TextLink
OPPOSITION- Anonymous, "Organic Material Effusion Cell", MBE, (20160330), URL: https://web.archive.org/web/ 20160330012940/http://www.mbe-komponenten.de/products/mbe- components/effusion-cells/ome.php, XP055932913-
OPPOSITION- Biasiol G, Sorba L, "MOLECULAR BEAM EPITAXY: PRINCIPLES AND APPLICATIONS", Crystal growth of materials for energy production and energy-saving applications, (20010101), pages 66 - 83, Crystal growth of materials for energy production and energy-saving applications, URL: http://citeseerx.ist.psu.edu/viewdoc/download?doi=10.1.1.501.1040&rep=rep1&type=pdf, (20220620), XP055932872-
OPPOSITION- Doctoral thesis "Molecular Beam Epitaxy Growth Technology and Properties of GaAsBi Alloys" by Ryan B. Lewis, The University of British Columbia. 2014:-
OPPOSITION- Extract from "Molecular Beam Epitaxy. Fundamentals and Current Status'" by Marian A. Herman and Helmut Sitter, 2013, Springer Science & Business Media;-
OPPOSITION- Faebian, "Essential maintenance: MBE bake out", FAEBIAN Batisman, (20121126), FAEBIAN Batisman, URL: https://faebianbastiman.wordpress.com/2012/11/26/mbe-bake-out/, (20220620), XP055932929-
OPPOSITION- Gatzen Hans H., Saile Volker, Leuthold Jürg, "3.2.4 Molecular Beam Epitaxy (MBE)", Micro and Nano Fabrication, Berlin, Heidelberg, Springer Berlin Heidelberg, (20150101), pages 88 - 92, ISBN 978-3-662-44395-8, XP055932867-
OPPOSITION- https://faebianbastiman.wordpress.eom/2012/11/26/mbe-bake-out/Article on the blog pgae Of Mr Fabian Bastiman. published in 2012:-
OPPOSITION- Internet page:httpsj//web.archive.org/web/20160330012940/http://www.mbe- komponenten.de/products*iin>ecomponents/ effusion-cells/ome.php,taken from from "archive.org”-
OPPOSITION- Lewis Ryan B, "Molecular beam epitaxy growth technology and properties of GaAsBi alloys", THESIS, University of British Columbia, UNIVERSITY OF BRITISH COLUMBIA, UNIVERSITY OF BRITISH COLUMBIA, (20140401), THESIS, URL: https://central.bac-lac.gc.ca/.item?id=TC-BVAU-46478&op=pdf&app=Library&oclc_number=1033004711, (20220620), XP055932874-
OPPOSITION- Munshi Abdul Mazid, "Epitaxial Growth of SelfCatalyzed GaAs Nanowires by Molecular Beam Epitaxy", Thesis, Norwegian University of Science and Technology, Norwegian University of Science and Technology, (20140501), Thesis, URL: https://ntnuopen.ntnu.no/ntnu-xmlui/handle/11250/2370953, (20220620), XP055932927-
OPPOSITION- Franchi, S. Trevisi, G. Seravalli, L. Frigeri, P., "Quantum dot nanostructures and molecular beam epitaxy", PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS., ELSEVIER PUBLISHING, BARKING., GB, GB , (20030101), vol. 47, no. 2-3, doi:10.1016/j.pcrysgrow.2005.01.002, ISSN 0960-8974, pages 166 - 195, XP004906937

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