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Explore patent oppositions filed by Carl Zeiss Smt against competitors, revealing strategic technology disputes and market positioning. Monitor opposition details, timelines, and disputed innovations to understand competitive dynamics and IP enforcement strategy.

Patent NumberTitleApplicantOpposition Date
EP3272432Debris Removal From High Aspect StructuresBRUKER NANOMay 22, 2024
EP3726566Debris Removal From A Trench Formed On A Photolithographic MaskBRUKER NANOMar 2, 2024
EP3748431Debris Removal From High Aspect StructuresBRUKER NANOJun 8, 2022